10/26/2012	11:54:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	11:54:14 AM	Recipe started at 11:54 AM
10/26/2012	11:54:14 AM	Helium valve closed
10/26/2012	11:54:14 AM	H2 valve closed
10/26/2012	11:54:14 AM	BCl3 valve closed
10/26/2012	11:54:14 AM	PH3 valve closed
10/26/2012	11:54:14 AM	SiCl4 pre valve closed
10/26/2012	11:54:14 AM	SiCl4 post valve closed
10/26/2012	11:54:14 AM	Main Vac valve closed
10/26/2012	11:54:14 AM	Bypass valve closed
10/26/2012	11:54:14 AM	Bubbler valve closed
10/26/2012	11:54:14 AM	Helium MFC set to  0.000000
10/26/2012	11:54:14 AM	H2 MFC set to  0.000000
10/26/2012	11:54:14 AM	BCl3 MFC set to  0.000000
10/26/2012	11:54:14 AM	PH3 MFC set to  0.000000
10/26/2012	11:54:14 AM	SiCl4 MFC set to  0.000000
10/26/2012	11:54:14 AM	Bypass solenoid MFC set to  0.000000
10/26/2012	11:54:15 AM	Tube furnace set to 0
10/26/2012	11:54:18 AM	H2 valve closed
10/26/2012	11:54:18 AM	BCl3 valve closed
10/26/2012	11:54:18 AM	PH3 valve closed
10/26/2012	11:54:18 AM	SiCl4 pre valve closed
10/26/2012	11:54:18 AM	SiCl4 post valve closed
10/26/2012	11:54:18 AM	Main Vac valve closed
10/26/2012	11:54:18 AM	Bypass valve closed
10/26/2012	11:54:18 AM	Bubbler valve closed
10/26/2012	11:54:18 AM	Helium valve opened
10/26/2012	11:54:18 AM	Helium MFC set to  500.000000
10/26/2012	11:54:18 AM	H2 MFC set to  0.000000
10/26/2012	11:54:18 AM	BCl3 MFC set to  0.000000
10/26/2012	11:54:18 AM	PH3 MFC set to  0.000000
10/26/2012	11:54:18 AM	SiCl4 MFC set to  0.000000
10/26/2012	11:54:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2012	11:54:18 AM	Tube furnace set to 0
10/26/2012	11:55:31 AM	Helium valve closed
10/26/2012	11:55:31 AM	H2 valve closed
10/26/2012	11:55:31 AM	BCl3 valve closed
10/26/2012	11:55:31 AM	PH3 valve closed
10/26/2012	11:55:31 AM	SiCl4 pre valve closed
10/26/2012	11:55:31 AM	SiCl4 post valve closed
10/26/2012	11:55:31 AM	Main Vac valve closed
10/26/2012	11:55:31 AM	Bypass valve closed
10/26/2012	11:55:31 AM	Bubbler valve closed
10/26/2012	11:55:31 AM	Helium MFC set to  0.000000
10/26/2012	11:55:31 AM	H2 MFC set to  0.000000
10/26/2012	11:55:31 AM	BCl3 MFC set to  0.000000
10/26/2012	11:55:31 AM	PH3 MFC set to  0.000000
10/26/2012	11:55:31 AM	SiCl4 MFC set to  0.000000
10/26/2012	11:55:31 AM	Bypass solenoid MFC set to  0.000000
10/26/2012	11:55:31 AM	Tube furnace set to 0
10/26/2012	11:55:32 AM	Run finished at 11:55 AM
10/26/2012	11:55:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	11:57:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	11:57:11 AM	Recipe started at 11:57 AM
10/26/2012	11:57:11 AM	Helium valve closed
10/26/2012	11:57:11 AM	H2 valve closed
10/26/2012	11:57:11 AM	BCl3 valve closed
10/26/2012	11:57:11 AM	PH3 valve closed
10/26/2012	11:57:11 AM	SiCl4 pre valve closed
10/26/2012	11:57:11 AM	SiCl4 post valve closed
10/26/2012	11:57:11 AM	Main Vac valve closed
10/26/2012	11:57:11 AM	Bubbler valve closed
10/26/2012	11:57:11 AM	Bypass valve opened
10/26/2012	11:57:11 AM	Helium MFC set to  0.000000
10/26/2012	11:57:11 AM	H2 MFC set to  0.000000
10/26/2012	11:57:11 AM	BCl3 MFC set to  0.000000
10/26/2012	11:57:11 AM	PH3 MFC set to  0.000000
10/26/2012	11:57:11 AM	SiCl4 MFC set to  0.000000
10/26/2012	11:57:11 AM	Bypass solenoid MFC set to  0.000000
10/26/2012	11:57:11 AM	Tube furnace set to 0
10/26/2012	11:58:36 AM	Helium valve closed
10/26/2012	11:58:36 AM	H2 valve closed
10/26/2012	11:58:36 AM	BCl3 valve closed
10/26/2012	11:58:36 AM	PH3 valve closed
10/26/2012	11:58:36 AM	SiCl4 pre valve closed
10/26/2012	11:58:36 AM	SiCl4 post valve closed
10/26/2012	11:58:36 AM	Main Vac valve closed
10/26/2012	11:58:36 AM	Bubbler valve closed
10/26/2012	11:58:36 AM	Bypass valve opened
10/26/2012	11:58:36 AM	Helium MFC set to  0.000000
10/26/2012	11:58:36 AM	H2 MFC set to  0.000000
10/26/2012	11:58:36 AM	BCl3 MFC set to  0.000000
10/26/2012	11:58:36 AM	PH3 MFC set to  0.000000
10/26/2012	11:58:36 AM	SiCl4 MFC set to  0.000000
10/26/2012	11:58:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2012	11:58:36 AM	Tube furnace set to 0
10/26/2012	11:59:36 AM	Helium valve closed
10/26/2012	11:59:36 AM	H2 valve closed
10/26/2012	11:59:36 AM	BCl3 valve closed
10/26/2012	11:59:36 AM	PH3 valve closed
10/26/2012	11:59:36 AM	SiCl4 pre valve closed
10/26/2012	11:59:36 AM	SiCl4 post valve closed
10/26/2012	11:59:36 AM	Bypass valve closed
10/26/2012	11:59:36 AM	Bubbler valve closed
10/26/2012	11:59:36 AM	Main Vac valve opened
10/26/2012	11:59:36 AM	Helium MFC set to  0.000000
10/26/2012	11:59:36 AM	H2 MFC set to  0.000000
10/26/2012	11:59:36 AM	BCl3 MFC set to  0.000000
10/26/2012	11:59:36 AM	PH3 MFC set to  0.000000
10/26/2012	11:59:36 AM	SiCl4 MFC set to  0.000000
10/26/2012	11:59:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2012	11:59:37 AM	Tube furnace set to 0
10/26/2012	11:59:38 AM	Run finished at 11:59 AM
10/26/2012	11:59:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	12:00:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	12:00:54 PM	Recipe started at 12:00 PM
10/26/2012	12:00:54 PM	Helium valve closed
10/26/2012	12:00:54 PM	H2 valve closed
10/26/2012	12:00:54 PM	BCl3 valve closed
10/26/2012	12:00:54 PM	PH3 valve closed
10/26/2012	12:00:54 PM	SiCl4 pre valve closed
10/26/2012	12:00:54 PM	SiCl4 post valve closed
10/26/2012	12:00:54 PM	Main Vac valve closed
10/26/2012	12:00:54 PM	Bypass valve closed
10/26/2012	12:00:54 PM	Bubbler valve closed
10/26/2012	12:00:54 PM	Helium MFC set to  0.000000
10/26/2012	12:00:54 PM	H2 MFC set to  0.000000
10/26/2012	12:00:54 PM	BCl3 MFC set to  0.000000
10/26/2012	12:00:54 PM	PH3 MFC set to  0.000000
10/26/2012	12:00:54 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:00:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:00:54 PM	Tube furnace set to 0
10/26/2012	12:00:57 PM	H2 valve closed
10/26/2012	12:00:57 PM	BCl3 valve closed
10/26/2012	12:00:57 PM	PH3 valve closed
10/26/2012	12:00:57 PM	SiCl4 pre valve closed
10/26/2012	12:00:57 PM	SiCl4 post valve closed
10/26/2012	12:00:57 PM	Main Vac valve closed
10/26/2012	12:00:57 PM	Bypass valve closed
10/26/2012	12:00:57 PM	Bubbler valve closed
10/26/2012	12:00:57 PM	Helium valve opened
10/26/2012	12:00:57 PM	Helium MFC set to  500.000000
10/26/2012	12:00:57 PM	H2 MFC set to  0.000000
10/26/2012	12:00:57 PM	BCl3 MFC set to  0.000000
10/26/2012	12:00:57 PM	PH3 MFC set to  0.000000
10/26/2012	12:00:57 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:00:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:00:57 PM	Tube furnace set to 0
10/26/2012	12:02:11 PM	Helium valve closed
10/26/2012	12:02:11 PM	H2 valve closed
10/26/2012	12:02:11 PM	BCl3 valve closed
10/26/2012	12:02:11 PM	PH3 valve closed
10/26/2012	12:02:11 PM	SiCl4 pre valve closed
10/26/2012	12:02:11 PM	SiCl4 post valve closed
10/26/2012	12:02:11 PM	Main Vac valve closed
10/26/2012	12:02:11 PM	Bypass valve closed
10/26/2012	12:02:11 PM	Bubbler valve closed
10/26/2012	12:02:11 PM	Helium MFC set to  0.000000
10/26/2012	12:02:11 PM	H2 MFC set to  0.000000
10/26/2012	12:02:11 PM	BCl3 MFC set to  0.000000
10/26/2012	12:02:11 PM	PH3 MFC set to  0.000000
10/26/2012	12:02:11 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:02:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:02:11 PM	Tube furnace set to 0
10/26/2012	12:02:12 PM	Run finished at 12:02 PM
10/26/2012	12:02:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	12:06:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	12:06:13 PM	Recipe started at 12:06 PM
10/26/2012	12:06:13 PM	Helium valve closed
10/26/2012	12:06:13 PM	H2 valve closed
10/26/2012	12:06:13 PM	BCl3 valve closed
10/26/2012	12:06:13 PM	PH3 valve closed
10/26/2012	12:06:13 PM	SiCl4 pre valve closed
10/26/2012	12:06:13 PM	SiCl4 post valve closed
10/26/2012	12:06:13 PM	Main Vac valve closed
10/26/2012	12:06:14 PM	Bubbler valve closed
10/26/2012	12:06:14 PM	Bypass valve opened
10/26/2012	12:06:14 PM	Helium MFC set to  0.000000
10/26/2012	12:06:14 PM	H2 MFC set to  0.000000
10/26/2012	12:06:14 PM	BCl3 MFC set to  0.000000
10/26/2012	12:06:14 PM	PH3 MFC set to  0.000000
10/26/2012	12:06:14 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:06:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:06:14 PM	Tube furnace set to 0
10/26/2012	12:07:34 PM	Helium valve closed
10/26/2012	12:07:34 PM	H2 valve closed
10/26/2012	12:07:34 PM	BCl3 valve closed
10/26/2012	12:07:34 PM	PH3 valve closed
10/26/2012	12:07:34 PM	SiCl4 pre valve closed
10/26/2012	12:07:34 PM	SiCl4 post valve closed
10/26/2012	12:07:34 PM	Main Vac valve closed
10/26/2012	12:07:34 PM	Bubbler valve closed
10/26/2012	12:07:34 PM	Bypass valve opened
10/26/2012	12:07:34 PM	Helium MFC set to  0.000000
10/26/2012	12:07:34 PM	H2 MFC set to  0.000000
10/26/2012	12:07:34 PM	BCl3 MFC set to  0.000000
10/26/2012	12:07:34 PM	PH3 MFC set to  0.000000
10/26/2012	12:07:34 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:07:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:07:34 PM	Tube furnace set to 0
10/26/2012	12:08:09 PM	Helium valve closed
10/26/2012	12:08:09 PM	H2 valve closed
10/26/2012	12:08:09 PM	BCl3 valve closed
10/26/2012	12:08:09 PM	PH3 valve closed
10/26/2012	12:08:09 PM	SiCl4 pre valve closed
10/26/2012	12:08:09 PM	SiCl4 post valve closed
10/26/2012	12:08:09 PM	Bypass valve closed
10/26/2012	12:08:10 PM	Bubbler valve closed
10/26/2012	12:08:10 PM	Main Vac valve opened
10/26/2012	12:08:10 PM	Helium MFC set to  0.000000
10/26/2012	12:08:10 PM	H2 MFC set to  0.000000
10/26/2012	12:08:10 PM	BCl3 MFC set to  0.000000
10/26/2012	12:08:10 PM	PH3 MFC set to  0.000000
10/26/2012	12:08:10 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:08:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:08:10 PM	Tube furnace set to 0
10/26/2012	12:08:11 PM	Run finished at 12:08 PM
10/26/2012	12:08:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	12:30:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	12:30:46 PM	Recipe started at 12:30 PM
10/26/2012	12:30:46 PM	Helium valve closed
10/26/2012	12:30:46 PM	H2 valve closed
10/26/2012	12:30:46 PM	BCl3 valve closed
10/26/2012	12:30:46 PM	PH3 valve closed
10/26/2012	12:30:46 PM	SiCl4 pre valve closed
10/26/2012	12:30:46 PM	SiCl4 post valve closed
10/26/2012	12:30:46 PM	Main Vac valve closed
10/26/2012	12:30:46 PM	Bubbler valve closed
10/26/2012	12:30:46 PM	Bypass valve opened
10/26/2012	12:30:46 PM	Helium MFC set to  0.000000
10/26/2012	12:30:46 PM	H2 MFC set to  0.000000
10/26/2012	12:30:46 PM	BCl3 MFC set to  0.000000
10/26/2012	12:30:46 PM	PH3 MFC set to  0.000000
10/26/2012	12:30:46 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:30:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:30:46 PM	Tube furnace set to 0
10/26/2012	12:30:47 PM	Helium valve closed
10/26/2012	12:30:47 PM	H2 valve closed
10/26/2012	12:30:47 PM	BCl3 valve closed
10/26/2012	12:30:47 PM	PH3 valve closed
10/26/2012	12:30:47 PM	SiCl4 pre valve closed
10/26/2012	12:30:47 PM	SiCl4 post valve closed
10/26/2012	12:30:47 PM	Main Vac valve closed
10/26/2012	12:30:47 PM	Bubbler valve closed
10/26/2012	12:30:47 PM	Bypass valve opened
10/26/2012	12:30:47 PM	Helium MFC set to  0.000000
10/26/2012	12:30:47 PM	H2 MFC set to  0.000000
10/26/2012	12:30:47 PM	BCl3 MFC set to  0.000000
10/26/2012	12:30:47 PM	PH3 MFC set to  0.000000
10/26/2012	12:30:47 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:30:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:30:47 PM	Tube furnace set to 0
10/26/2012	12:30:48 PM	Helium valve closed
10/26/2012	12:30:48 PM	H2 valve closed
10/26/2012	12:30:48 PM	BCl3 valve closed
10/26/2012	12:30:48 PM	PH3 valve closed
10/26/2012	12:30:48 PM	SiCl4 pre valve closed
10/26/2012	12:30:48 PM	SiCl4 post valve closed
10/26/2012	12:30:48 PM	Bypass valve closed
10/26/2012	12:30:48 PM	Bubbler valve closed
10/26/2012	12:30:48 PM	Main Vac valve opened
10/26/2012	12:30:48 PM	Helium MFC set to  0.000000
10/26/2012	12:30:48 PM	H2 MFC set to  0.000000
10/26/2012	12:30:48 PM	BCl3 MFC set to  0.000000
10/26/2012	12:30:48 PM	PH3 MFC set to  0.000000
10/26/2012	12:30:48 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:30:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:30:48 PM	Tube furnace set to 0
10/26/2012	12:30:49 PM	H2 valve closed
10/26/2012	12:30:49 PM	BCl3 valve closed
10/26/2012	12:30:49 PM	PH3 valve closed
10/26/2012	12:30:49 PM	SiCl4 pre valve closed
10/26/2012	12:30:49 PM	SiCl4 post valve closed
10/26/2012	12:30:49 PM	Bypass valve closed
10/26/2012	12:30:49 PM	Bubbler valve closed
10/26/2012	12:30:49 PM	Helium valve opened
10/26/2012	12:30:49 PM	Main Vac valve opened
10/26/2012	12:30:49 PM	Helium MFC set to  20.000000
10/26/2012	12:30:49 PM	H2 MFC set to  0.000000
10/26/2012	12:30:49 PM	BCl3 MFC set to  0.000000
10/26/2012	12:30:49 PM	PH3 MFC set to  0.000000
10/26/2012	12:30:49 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:30:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:30:49 PM	Tube furnace set to 0
10/26/2012	12:31:19 PM	Helium valve closed
10/26/2012	12:31:19 PM	H2 valve closed
10/26/2012	12:31:19 PM	BCl3 valve closed
10/26/2012	12:31:19 PM	PH3 valve closed
10/26/2012	12:31:19 PM	SiCl4 pre valve closed
10/26/2012	12:31:19 PM	SiCl4 post valve closed
10/26/2012	12:31:19 PM	Bypass valve closed
10/26/2012	12:31:19 PM	Bubbler valve closed
10/26/2012	12:31:19 PM	Main Vac valve opened
10/26/2012	12:31:19 PM	Helium MFC set to  0.000000
10/26/2012	12:31:19 PM	H2 MFC set to  0.000000
10/26/2012	12:31:19 PM	BCl3 MFC set to  0.000000
10/26/2012	12:31:19 PM	PH3 MFC set to  0.000000
10/26/2012	12:31:19 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:31:19 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:31:20 PM	Tube furnace set to 0
10/26/2012	12:31:50 PM	H2 valve closed
10/26/2012	12:31:50 PM	BCl3 valve closed
10/26/2012	12:31:50 PM	PH3 valve closed
10/26/2012	12:31:50 PM	SiCl4 pre valve closed
10/26/2012	12:31:50 PM	SiCl4 post valve closed
10/26/2012	12:31:50 PM	Bypass valve closed
10/26/2012	12:31:50 PM	Bubbler valve closed
10/26/2012	12:31:50 PM	Helium valve opened
10/26/2012	12:31:50 PM	Main Vac valve opened
10/26/2012	12:31:50 PM	Helium MFC set to  20.000000
10/26/2012	12:31:50 PM	H2 MFC set to  0.000000
10/26/2012	12:31:50 PM	BCl3 MFC set to  0.000000
10/26/2012	12:31:50 PM	PH3 MFC set to  0.000000
10/26/2012	12:31:50 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:31:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:31:50 PM	Tube furnace set to 0
10/26/2012	12:32:20 PM	Helium valve closed
10/26/2012	12:32:20 PM	H2 valve closed
10/26/2012	12:32:20 PM	BCl3 valve closed
10/26/2012	12:32:20 PM	PH3 valve closed
10/26/2012	12:32:20 PM	SiCl4 pre valve closed
10/26/2012	12:32:20 PM	SiCl4 post valve closed
10/26/2012	12:32:20 PM	Bypass valve closed
10/26/2012	12:32:20 PM	Bubbler valve closed
10/26/2012	12:32:20 PM	Main Vac valve opened
10/26/2012	12:32:20 PM	Helium MFC set to  0.000000
10/26/2012	12:32:20 PM	H2 MFC set to  0.000000
10/26/2012	12:32:20 PM	BCl3 MFC set to  0.000000
10/26/2012	12:32:20 PM	PH3 MFC set to  0.000000
10/26/2012	12:32:20 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:32:20 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:32:20 PM	Tube furnace set to 0
10/26/2012	12:32:50 PM	H2 valve closed
10/26/2012	12:32:50 PM	BCl3 valve closed
10/26/2012	12:32:50 PM	PH3 valve closed
10/26/2012	12:32:50 PM	SiCl4 pre valve closed
10/26/2012	12:32:50 PM	SiCl4 post valve closed
10/26/2012	12:32:50 PM	Bypass valve closed
10/26/2012	12:32:50 PM	Bubbler valve closed
10/26/2012	12:32:50 PM	Helium valve opened
10/26/2012	12:32:50 PM	Main Vac valve opened
10/26/2012	12:32:50 PM	Helium MFC set to  20.000000
10/26/2012	12:32:50 PM	H2 MFC set to  0.000000
10/26/2012	12:32:50 PM	BCl3 MFC set to  0.000000
10/26/2012	12:32:50 PM	PH3 MFC set to  0.000000
10/26/2012	12:32:50 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:32:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:32:50 PM	Tube furnace set to 0
10/26/2012	12:33:20 PM	Helium valve closed
10/26/2012	12:33:20 PM	H2 valve closed
10/26/2012	12:33:20 PM	BCl3 valve closed
10/26/2012	12:33:20 PM	PH3 valve closed
10/26/2012	12:33:20 PM	SiCl4 pre valve closed
10/26/2012	12:33:20 PM	SiCl4 post valve closed
10/26/2012	12:33:20 PM	Bypass valve closed
10/26/2012	12:33:20 PM	Bubbler valve closed
10/26/2012	12:33:20 PM	Main Vac valve opened
10/26/2012	12:33:20 PM	Helium MFC set to  0.000000
10/26/2012	12:33:20 PM	H2 MFC set to  0.000000
10/26/2012	12:33:20 PM	BCl3 MFC set to  0.000000
10/26/2012	12:33:20 PM	PH3 MFC set to  0.000000
10/26/2012	12:33:20 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:33:20 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:33:21 PM	Tube furnace set to 0
10/26/2012	12:33:51 PM	H2 valve closed
10/26/2012	12:33:51 PM	BCl3 valve closed
10/26/2012	12:33:51 PM	PH3 valve closed
10/26/2012	12:33:51 PM	SiCl4 pre valve closed
10/26/2012	12:33:51 PM	SiCl4 post valve closed
10/26/2012	12:33:51 PM	Bypass valve closed
10/26/2012	12:33:51 PM	Bubbler valve closed
10/26/2012	12:33:51 PM	Helium valve opened
10/26/2012	12:33:51 PM	Main Vac valve opened
10/26/2012	12:33:51 PM	Helium MFC set to  20.000000
10/26/2012	12:33:51 PM	H2 MFC set to  0.000000
10/26/2012	12:33:51 PM	BCl3 MFC set to  0.000000
10/26/2012	12:33:51 PM	PH3 MFC set to  0.000000
10/26/2012	12:33:51 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:33:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:33:51 PM	Tube furnace set to 0
10/26/2012	12:34:21 PM	Helium valve closed
10/26/2012	12:34:21 PM	H2 valve closed
10/26/2012	12:34:21 PM	BCl3 valve closed
10/26/2012	12:34:21 PM	PH3 valve closed
10/26/2012	12:34:21 PM	SiCl4 pre valve closed
10/26/2012	12:34:21 PM	SiCl4 post valve closed
10/26/2012	12:34:21 PM	Bypass valve closed
10/26/2012	12:34:21 PM	Bubbler valve closed
10/26/2012	12:34:21 PM	Main Vac valve opened
10/26/2012	12:34:21 PM	Helium MFC set to  0.000000
10/26/2012	12:34:21 PM	H2 MFC set to  0.000000
10/26/2012	12:34:21 PM	BCl3 MFC set to  0.000000
10/26/2012	12:34:21 PM	PH3 MFC set to  0.000000
10/26/2012	12:34:21 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:34:21 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:34:21 PM	Tube furnace set to 0
10/26/2012	12:34:51 PM	H2 valve closed
10/26/2012	12:34:51 PM	BCl3 valve closed
10/26/2012	12:34:51 PM	PH3 valve closed
10/26/2012	12:34:51 PM	SiCl4 pre valve closed
10/26/2012	12:34:51 PM	SiCl4 post valve closed
10/26/2012	12:34:51 PM	Bypass valve closed
10/26/2012	12:34:51 PM	Bubbler valve closed
10/26/2012	12:34:51 PM	Helium valve opened
10/26/2012	12:34:51 PM	Main Vac valve opened
10/26/2012	12:34:51 PM	Helium MFC set to  20.000000
10/26/2012	12:34:51 PM	H2 MFC set to  0.000000
10/26/2012	12:34:51 PM	BCl3 MFC set to  0.000000
10/26/2012	12:34:51 PM	PH3 MFC set to  0.000000
10/26/2012	12:34:51 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:34:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:34:51 PM	Tube furnace set to 0
10/26/2012	12:35:21 PM	Helium valve closed
10/26/2012	12:35:21 PM	H2 valve closed
10/26/2012	12:35:21 PM	BCl3 valve closed
10/26/2012	12:35:21 PM	PH3 valve closed
10/26/2012	12:35:21 PM	SiCl4 pre valve closed
10/26/2012	12:35:21 PM	SiCl4 post valve closed
10/26/2012	12:35:21 PM	Bypass valve closed
10/26/2012	12:35:21 PM	Bubbler valve closed
10/26/2012	12:35:21 PM	Main Vac valve opened
10/26/2012	12:35:21 PM	Helium MFC set to  0.000000
10/26/2012	12:35:21 PM	H2 MFC set to  0.000000
10/26/2012	12:35:21 PM	BCl3 MFC set to  0.000000
10/26/2012	12:35:21 PM	PH3 MFC set to  0.000000
10/26/2012	12:35:21 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:35:21 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:35:22 PM	Tube furnace set to 0
10/26/2012	12:35:52 PM	H2 valve closed
10/26/2012	12:35:52 PM	BCl3 valve closed
10/26/2012	12:35:52 PM	PH3 valve closed
10/26/2012	12:35:52 PM	SiCl4 pre valve closed
10/26/2012	12:35:52 PM	SiCl4 post valve closed
10/26/2012	12:35:52 PM	Bypass valve closed
10/26/2012	12:35:52 PM	Bubbler valve closed
10/26/2012	12:35:52 PM	Helium valve opened
10/26/2012	12:35:52 PM	Main Vac valve opened
10/26/2012	12:35:52 PM	Helium MFC set to  20.000000
10/26/2012	12:35:52 PM	H2 MFC set to  0.000000
10/26/2012	12:35:52 PM	BCl3 MFC set to  0.000000
10/26/2012	12:35:52 PM	PH3 MFC set to  0.000000
10/26/2012	12:35:52 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:35:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:35:52 PM	Tube furnace set to 0
10/26/2012	12:36:22 PM	Helium valve closed
10/26/2012	12:36:22 PM	H2 valve closed
10/26/2012	12:36:22 PM	BCl3 valve closed
10/26/2012	12:36:22 PM	PH3 valve closed
10/26/2012	12:36:22 PM	SiCl4 pre valve closed
10/26/2012	12:36:22 PM	SiCl4 post valve closed
10/26/2012	12:36:22 PM	Bypass valve closed
10/26/2012	12:36:22 PM	Bubbler valve closed
10/26/2012	12:36:22 PM	Main Vac valve opened
10/26/2012	12:36:22 PM	Helium MFC set to  0.000000
10/26/2012	12:36:22 PM	H2 MFC set to  0.000000
10/26/2012	12:36:22 PM	BCl3 MFC set to  0.000000
10/26/2012	12:36:22 PM	PH3 MFC set to  0.000000
10/26/2012	12:36:22 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:36:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:36:22 PM	Tube furnace set to 0
10/26/2012	12:36:52 PM	H2 valve closed
10/26/2012	12:36:52 PM	BCl3 valve closed
10/26/2012	12:36:52 PM	PH3 valve closed
10/26/2012	12:36:52 PM	SiCl4 pre valve closed
10/26/2012	12:36:52 PM	SiCl4 post valve closed
10/26/2012	12:36:52 PM	Bypass valve closed
10/26/2012	12:36:52 PM	Bubbler valve closed
10/26/2012	12:36:52 PM	Helium valve opened
10/26/2012	12:36:52 PM	Main Vac valve opened
10/26/2012	12:36:52 PM	Helium MFC set to  20.000000
10/26/2012	12:36:52 PM	H2 MFC set to  0.000000
10/26/2012	12:36:52 PM	BCl3 MFC set to  0.000000
10/26/2012	12:36:52 PM	PH3 MFC set to  0.000000
10/26/2012	12:36:52 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:36:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:36:52 PM	Tube furnace set to 0
10/26/2012	12:37:22 PM	Helium valve closed
10/26/2012	12:37:22 PM	H2 valve closed
10/26/2012	12:37:22 PM	BCl3 valve closed
10/26/2012	12:37:22 PM	PH3 valve closed
10/26/2012	12:37:22 PM	SiCl4 pre valve closed
10/26/2012	12:37:22 PM	SiCl4 post valve closed
10/26/2012	12:37:22 PM	Bypass valve closed
10/26/2012	12:37:22 PM	Bubbler valve closed
10/26/2012	12:37:22 PM	Main Vac valve opened
10/26/2012	12:37:22 PM	Helium MFC set to  0.000000
10/26/2012	12:37:22 PM	H2 MFC set to  0.000000
10/26/2012	12:37:22 PM	BCl3 MFC set to  0.000000
10/26/2012	12:37:22 PM	PH3 MFC set to  0.000000
10/26/2012	12:37:22 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:37:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:37:23 PM	Tube furnace set to 0
10/26/2012	12:37:53 PM	H2 valve closed
10/26/2012	12:37:53 PM	BCl3 valve closed
10/26/2012	12:37:53 PM	PH3 valve closed
10/26/2012	12:37:53 PM	SiCl4 pre valve closed
10/26/2012	12:37:53 PM	SiCl4 post valve closed
10/26/2012	12:37:53 PM	Bypass valve closed
10/26/2012	12:37:53 PM	Bubbler valve closed
10/26/2012	12:37:53 PM	Helium valve opened
10/26/2012	12:37:53 PM	Main Vac valve opened
10/26/2012	12:37:53 PM	Helium MFC set to  20.000000
10/26/2012	12:37:53 PM	H2 MFC set to  0.000000
10/26/2012	12:37:53 PM	BCl3 MFC set to  0.000000
10/26/2012	12:37:53 PM	PH3 MFC set to  0.000000
10/26/2012	12:37:53 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:37:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:37:53 PM	Tube furnace set to 0
10/26/2012	12:38:23 PM	Helium valve closed
10/26/2012	12:38:23 PM	H2 valve closed
10/26/2012	12:38:23 PM	BCl3 valve closed
10/26/2012	12:38:23 PM	PH3 valve closed
10/26/2012	12:38:23 PM	SiCl4 pre valve closed
10/26/2012	12:38:23 PM	SiCl4 post valve closed
10/26/2012	12:38:23 PM	Bypass valve closed
10/26/2012	12:38:23 PM	Bubbler valve closed
10/26/2012	12:38:23 PM	Main Vac valve opened
10/26/2012	12:38:23 PM	Helium MFC set to  0.000000
10/26/2012	12:38:23 PM	H2 MFC set to  0.000000
10/26/2012	12:38:23 PM	BCl3 MFC set to  0.000000
10/26/2012	12:38:23 PM	PH3 MFC set to  0.000000
10/26/2012	12:38:23 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:38:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:38:23 PM	Tube furnace set to 0
10/26/2012	12:38:53 PM	H2 valve closed
10/26/2012	12:38:53 PM	BCl3 valve closed
10/26/2012	12:38:53 PM	PH3 valve closed
10/26/2012	12:38:53 PM	SiCl4 pre valve closed
10/26/2012	12:38:53 PM	SiCl4 post valve closed
10/26/2012	12:38:53 PM	Bypass valve closed
10/26/2012	12:38:53 PM	Bubbler valve closed
10/26/2012	12:38:53 PM	Helium valve opened
10/26/2012	12:38:53 PM	Main Vac valve opened
10/26/2012	12:38:53 PM	Helium MFC set to  20.000000
10/26/2012	12:38:53 PM	H2 MFC set to  0.000000
10/26/2012	12:38:53 PM	BCl3 MFC set to  0.000000
10/26/2012	12:38:53 PM	PH3 MFC set to  0.000000
10/26/2012	12:38:53 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:38:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:38:53 PM	Tube furnace set to 0
10/26/2012	12:39:23 PM	Helium valve closed
10/26/2012	12:39:23 PM	H2 valve closed
10/26/2012	12:39:23 PM	BCl3 valve closed
10/26/2012	12:39:23 PM	PH3 valve closed
10/26/2012	12:39:23 PM	SiCl4 pre valve closed
10/26/2012	12:39:23 PM	SiCl4 post valve closed
10/26/2012	12:39:23 PM	Bypass valve closed
10/26/2012	12:39:23 PM	Bubbler valve closed
10/26/2012	12:39:23 PM	Main Vac valve opened
10/26/2012	12:39:23 PM	Helium MFC set to  0.000000
10/26/2012	12:39:23 PM	H2 MFC set to  0.000000
10/26/2012	12:39:23 PM	BCl3 MFC set to  0.000000
10/26/2012	12:39:23 PM	PH3 MFC set to  0.000000
10/26/2012	12:39:23 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:39:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:39:24 PM	Tube furnace set to 0
10/26/2012	12:39:54 PM	H2 valve closed
10/26/2012	12:39:54 PM	BCl3 valve closed
10/26/2012	12:39:54 PM	PH3 valve closed
10/26/2012	12:39:54 PM	SiCl4 pre valve closed
10/26/2012	12:39:54 PM	SiCl4 post valve closed
10/26/2012	12:39:54 PM	Bypass valve closed
10/26/2012	12:39:54 PM	Bubbler valve closed
10/26/2012	12:39:54 PM	Helium valve opened
10/26/2012	12:39:54 PM	Main Vac valve opened
10/26/2012	12:39:54 PM	Helium MFC set to  20.000000
10/26/2012	12:39:54 PM	H2 MFC set to  0.000000
10/26/2012	12:39:54 PM	BCl3 MFC set to  0.000000
10/26/2012	12:39:54 PM	PH3 MFC set to  0.000000
10/26/2012	12:39:54 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:39:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:39:54 PM	Tube furnace set to 0
10/26/2012	12:40:24 PM	Helium valve closed
10/26/2012	12:40:24 PM	H2 valve closed
10/26/2012	12:40:24 PM	BCl3 valve closed
10/26/2012	12:40:24 PM	PH3 valve closed
10/26/2012	12:40:24 PM	SiCl4 pre valve closed
10/26/2012	12:40:24 PM	SiCl4 post valve closed
10/26/2012	12:40:24 PM	Bypass valve closed
10/26/2012	12:40:24 PM	Bubbler valve closed
10/26/2012	12:40:24 PM	Main Vac valve opened
10/26/2012	12:40:24 PM	Helium MFC set to  0.000000
10/26/2012	12:40:24 PM	H2 MFC set to  0.000000
10/26/2012	12:40:24 PM	BCl3 MFC set to  0.000000
10/26/2012	12:40:24 PM	PH3 MFC set to  0.000000
10/26/2012	12:40:24 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:40:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:40:24 PM	Tube furnace set to 0
10/26/2012	12:40:25 PM	Run finished at 12:40 PM
10/26/2012	12:40:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	12:44:03 PM	Main Vac valve closed
10/26/2012	12:44:18 PM	Main Vac valve opened
10/26/2012	12:44:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	12:45:06 PM	Recipe started at 12:45 PM
10/26/2012	12:45:06 PM	Helium valve closed
10/26/2012	12:45:06 PM	H2 valve closed
10/26/2012	12:45:06 PM	BCl3 valve closed
10/26/2012	12:45:06 PM	PH3 valve closed
10/26/2012	12:45:06 PM	SiCl4 pre valve closed
10/26/2012	12:45:06 PM	SiCl4 post valve closed
10/26/2012	12:45:06 PM	Main Vac valve closed
10/26/2012	12:45:06 PM	Bubbler valve closed
10/26/2012	12:45:06 PM	Bypass valve opened
10/26/2012	12:45:06 PM	Helium MFC set to  0.000000
10/26/2012	12:45:06 PM	H2 MFC set to  0.000000
10/26/2012	12:45:06 PM	BCl3 MFC set to  0.000000
10/26/2012	12:45:06 PM	PH3 MFC set to  0.000000
10/26/2012	12:45:06 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:45:06 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:45:07 PM	Tube furnace set to 0
10/26/2012	12:45:07 PM	Helium valve closed
10/26/2012	12:45:07 PM	H2 valve closed
10/26/2012	12:45:07 PM	BCl3 valve closed
10/26/2012	12:45:07 PM	PH3 valve closed
10/26/2012	12:45:07 PM	SiCl4 pre valve closed
10/26/2012	12:45:07 PM	SiCl4 post valve closed
10/26/2012	12:45:07 PM	Main Vac valve closed
10/26/2012	12:45:07 PM	Bubbler valve closed
10/26/2012	12:45:07 PM	Bypass valve opened
10/26/2012	12:45:07 PM	Helium MFC set to  0.000000
10/26/2012	12:45:07 PM	H2 MFC set to  0.000000
10/26/2012	12:45:07 PM	BCl3 MFC set to  0.000000
10/26/2012	12:45:07 PM	PH3 MFC set to  0.000000
10/26/2012	12:45:07 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:45:07 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:45:07 PM	Tube furnace set to 0
10/26/2012	12:45:15 PM	Helium valve closed
10/26/2012	12:45:15 PM	H2 valve closed
10/26/2012	12:45:15 PM	BCl3 valve closed
10/26/2012	12:45:15 PM	PH3 valve closed
10/26/2012	12:45:15 PM	SiCl4 pre valve closed
10/26/2012	12:45:15 PM	SiCl4 post valve closed
10/26/2012	12:45:15 PM	Bypass valve closed
10/26/2012	12:45:15 PM	Bubbler valve closed
10/26/2012	12:45:15 PM	Main Vac valve opened
10/26/2012	12:45:15 PM	Helium MFC set to  0.000000
10/26/2012	12:45:15 PM	H2 MFC set to  0.000000
10/26/2012	12:45:15 PM	BCl3 MFC set to  0.000000
10/26/2012	12:45:15 PM	PH3 MFC set to  0.000000
10/26/2012	12:45:15 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:45:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:45:15 PM	Tube furnace set to 0
10/26/2012	12:45:27 PM	H2 valve closed
10/26/2012	12:45:27 PM	BCl3 valve closed
10/26/2012	12:45:27 PM	PH3 valve closed
10/26/2012	12:45:27 PM	SiCl4 pre valve closed
10/26/2012	12:45:27 PM	SiCl4 post valve closed
10/26/2012	12:45:27 PM	Bypass valve closed
10/26/2012	12:45:27 PM	Bubbler valve closed
10/26/2012	12:45:27 PM	Helium valve opened
10/26/2012	12:45:27 PM	Main Vac valve opened
10/26/2012	12:45:27 PM	Helium MFC set to  20.000000
10/26/2012	12:45:27 PM	H2 MFC set to  0.000000
10/26/2012	12:45:27 PM	BCl3 MFC set to  0.000000
10/26/2012	12:45:27 PM	PH3 MFC set to  0.000000
10/26/2012	12:45:27 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:45:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:45:27 PM	Tube furnace set to 0
10/26/2012	12:45:57 PM	Helium valve closed
10/26/2012	12:45:57 PM	H2 valve closed
10/26/2012	12:45:57 PM	BCl3 valve closed
10/26/2012	12:45:57 PM	PH3 valve closed
10/26/2012	12:45:57 PM	SiCl4 pre valve closed
10/26/2012	12:45:57 PM	SiCl4 post valve closed
10/26/2012	12:45:57 PM	Bypass valve closed
10/26/2012	12:45:57 PM	Bubbler valve closed
10/26/2012	12:45:57 PM	Main Vac valve opened
10/26/2012	12:45:57 PM	Helium MFC set to  0.000000
10/26/2012	12:45:57 PM	H2 MFC set to  0.000000
10/26/2012	12:45:57 PM	BCl3 MFC set to  0.000000
10/26/2012	12:45:57 PM	PH3 MFC set to  0.000000
10/26/2012	12:45:57 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:45:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:45:57 PM	Tube furnace set to 0
10/26/2012	12:46:27 PM	H2 valve closed
10/26/2012	12:46:27 PM	BCl3 valve closed
10/26/2012	12:46:27 PM	PH3 valve closed
10/26/2012	12:46:27 PM	SiCl4 pre valve closed
10/26/2012	12:46:27 PM	SiCl4 post valve closed
10/26/2012	12:46:27 PM	Bypass valve closed
10/26/2012	12:46:27 PM	Bubbler valve closed
10/26/2012	12:46:27 PM	Helium valve opened
10/26/2012	12:46:27 PM	Main Vac valve opened
10/26/2012	12:46:27 PM	Helium MFC set to  20.000000
10/26/2012	12:46:27 PM	H2 MFC set to  0.000000
10/26/2012	12:46:27 PM	BCl3 MFC set to  0.000000
10/26/2012	12:46:27 PM	PH3 MFC set to  0.000000
10/26/2012	12:46:27 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:46:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:46:28 PM	Tube furnace set to 0
10/26/2012	12:46:58 PM	Helium valve closed
10/26/2012	12:46:58 PM	H2 valve closed
10/26/2012	12:46:58 PM	BCl3 valve closed
10/26/2012	12:46:58 PM	PH3 valve closed
10/26/2012	12:46:58 PM	SiCl4 pre valve closed
10/26/2012	12:46:58 PM	SiCl4 post valve closed
10/26/2012	12:46:58 PM	Bypass valve closed
10/26/2012	12:46:58 PM	Bubbler valve closed
10/26/2012	12:46:58 PM	Main Vac valve opened
10/26/2012	12:46:58 PM	Helium MFC set to  0.000000
10/26/2012	12:46:58 PM	H2 MFC set to  0.000000
10/26/2012	12:46:58 PM	BCl3 MFC set to  0.000000
10/26/2012	12:46:58 PM	PH3 MFC set to  0.000000
10/26/2012	12:46:58 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:46:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:46:58 PM	Tube furnace set to 0
10/26/2012	12:47:28 PM	H2 valve closed
10/26/2012	12:47:28 PM	BCl3 valve closed
10/26/2012	12:47:28 PM	PH3 valve closed
10/26/2012	12:47:28 PM	SiCl4 pre valve closed
10/26/2012	12:47:28 PM	SiCl4 post valve closed
10/26/2012	12:47:28 PM	Bypass valve closed
10/26/2012	12:47:28 PM	Bubbler valve closed
10/26/2012	12:47:28 PM	Helium valve opened
10/26/2012	12:47:28 PM	Main Vac valve opened
10/26/2012	12:47:28 PM	Helium MFC set to  20.000000
10/26/2012	12:47:28 PM	H2 MFC set to  0.000000
10/26/2012	12:47:28 PM	BCl3 MFC set to  0.000000
10/26/2012	12:47:28 PM	PH3 MFC set to  0.000000
10/26/2012	12:47:28 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:47:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:47:28 PM	Tube furnace set to 0
10/26/2012	12:47:58 PM	Helium valve closed
10/26/2012	12:47:58 PM	H2 valve closed
10/26/2012	12:47:58 PM	BCl3 valve closed
10/26/2012	12:47:58 PM	PH3 valve closed
10/26/2012	12:47:58 PM	SiCl4 pre valve closed
10/26/2012	12:47:58 PM	SiCl4 post valve closed
10/26/2012	12:47:58 PM	Bypass valve closed
10/26/2012	12:47:58 PM	Bubbler valve closed
10/26/2012	12:47:58 PM	Main Vac valve opened
10/26/2012	12:47:58 PM	Helium MFC set to  0.000000
10/26/2012	12:47:58 PM	H2 MFC set to  0.000000
10/26/2012	12:47:58 PM	BCl3 MFC set to  0.000000
10/26/2012	12:47:58 PM	PH3 MFC set to  0.000000
10/26/2012	12:47:58 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:47:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:47:58 PM	Tube furnace set to 0
10/26/2012	12:48:28 PM	H2 valve closed
10/26/2012	12:48:28 PM	BCl3 valve closed
10/26/2012	12:48:28 PM	PH3 valve closed
10/26/2012	12:48:28 PM	SiCl4 pre valve closed
10/26/2012	12:48:28 PM	SiCl4 post valve closed
10/26/2012	12:48:28 PM	Bypass valve closed
10/26/2012	12:48:28 PM	Bubbler valve closed
10/26/2012	12:48:28 PM	Helium valve opened
10/26/2012	12:48:28 PM	Main Vac valve opened
10/26/2012	12:48:28 PM	Helium MFC set to  20.000000
10/26/2012	12:48:28 PM	H2 MFC set to  0.000000
10/26/2012	12:48:28 PM	BCl3 MFC set to  0.000000
10/26/2012	12:48:28 PM	PH3 MFC set to  0.000000
10/26/2012	12:48:28 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:48:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:48:29 PM	Tube furnace set to 0
10/26/2012	12:48:59 PM	Helium valve closed
10/26/2012	12:48:59 PM	H2 valve closed
10/26/2012	12:48:59 PM	BCl3 valve closed
10/26/2012	12:48:59 PM	PH3 valve closed
10/26/2012	12:48:59 PM	SiCl4 pre valve closed
10/26/2012	12:48:59 PM	SiCl4 post valve closed
10/26/2012	12:48:59 PM	Bypass valve closed
10/26/2012	12:48:59 PM	Bubbler valve closed
10/26/2012	12:48:59 PM	Main Vac valve opened
10/26/2012	12:48:59 PM	Helium MFC set to  0.000000
10/26/2012	12:48:59 PM	H2 MFC set to  0.000000
10/26/2012	12:48:59 PM	BCl3 MFC set to  0.000000
10/26/2012	12:48:59 PM	PH3 MFC set to  0.000000
10/26/2012	12:48:59 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:48:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:48:59 PM	Tube furnace set to 0
10/26/2012	12:49:29 PM	H2 valve closed
10/26/2012	12:49:29 PM	BCl3 valve closed
10/26/2012	12:49:29 PM	PH3 valve closed
10/26/2012	12:49:29 PM	SiCl4 pre valve closed
10/26/2012	12:49:29 PM	SiCl4 post valve closed
10/26/2012	12:49:29 PM	Bypass valve closed
10/26/2012	12:49:29 PM	Bubbler valve closed
10/26/2012	12:49:29 PM	Helium valve opened
10/26/2012	12:49:29 PM	Main Vac valve opened
10/26/2012	12:49:29 PM	Helium MFC set to  20.000000
10/26/2012	12:49:29 PM	H2 MFC set to  0.000000
10/26/2012	12:49:29 PM	BCl3 MFC set to  0.000000
10/26/2012	12:49:29 PM	PH3 MFC set to  0.000000
10/26/2012	12:49:29 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:49:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:49:29 PM	Tube furnace set to 0
10/26/2012	12:49:59 PM	Helium valve closed
10/26/2012	12:49:59 PM	H2 valve closed
10/26/2012	12:49:59 PM	BCl3 valve closed
10/26/2012	12:49:59 PM	PH3 valve closed
10/26/2012	12:49:59 PM	SiCl4 pre valve closed
10/26/2012	12:49:59 PM	SiCl4 post valve closed
10/26/2012	12:49:59 PM	Bypass valve closed
10/26/2012	12:49:59 PM	Bubbler valve closed
10/26/2012	12:49:59 PM	Main Vac valve opened
10/26/2012	12:49:59 PM	Helium MFC set to  0.000000
10/26/2012	12:49:59 PM	H2 MFC set to  0.000000
10/26/2012	12:49:59 PM	BCl3 MFC set to  0.000000
10/26/2012	12:49:59 PM	PH3 MFC set to  0.000000
10/26/2012	12:49:59 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:49:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:49:59 PM	Tube furnace set to 0
10/26/2012	12:50:29 PM	H2 valve closed
10/26/2012	12:50:29 PM	BCl3 valve closed
10/26/2012	12:50:29 PM	PH3 valve closed
10/26/2012	12:50:29 PM	SiCl4 pre valve closed
10/26/2012	12:50:29 PM	SiCl4 post valve closed
10/26/2012	12:50:29 PM	Bypass valve closed
10/26/2012	12:50:29 PM	Bubbler valve closed
10/26/2012	12:50:29 PM	Helium valve opened
10/26/2012	12:50:29 PM	Main Vac valve opened
10/26/2012	12:50:29 PM	Helium MFC set to  20.000000
10/26/2012	12:50:29 PM	H2 MFC set to  0.000000
10/26/2012	12:50:29 PM	BCl3 MFC set to  0.000000
10/26/2012	12:50:29 PM	PH3 MFC set to  0.000000
10/26/2012	12:50:29 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:50:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:50:30 PM	Tube furnace set to 0
10/26/2012	12:51:00 PM	Helium valve closed
10/26/2012	12:51:00 PM	H2 valve closed
10/26/2012	12:51:00 PM	BCl3 valve closed
10/26/2012	12:51:00 PM	PH3 valve closed
10/26/2012	12:51:00 PM	SiCl4 pre valve closed
10/26/2012	12:51:00 PM	SiCl4 post valve closed
10/26/2012	12:51:00 PM	Bypass valve closed
10/26/2012	12:51:00 PM	Bubbler valve closed
10/26/2012	12:51:00 PM	Main Vac valve opened
10/26/2012	12:51:00 PM	Helium MFC set to  0.000000
10/26/2012	12:51:00 PM	H2 MFC set to  0.000000
10/26/2012	12:51:00 PM	BCl3 MFC set to  0.000000
10/26/2012	12:51:00 PM	PH3 MFC set to  0.000000
10/26/2012	12:51:00 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:51:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:51:00 PM	Tube furnace set to 0
10/26/2012	12:51:30 PM	H2 valve closed
10/26/2012	12:51:30 PM	BCl3 valve closed
10/26/2012	12:51:30 PM	PH3 valve closed
10/26/2012	12:51:30 PM	SiCl4 pre valve closed
10/26/2012	12:51:30 PM	SiCl4 post valve closed
10/26/2012	12:51:30 PM	Bypass valve closed
10/26/2012	12:51:30 PM	Bubbler valve closed
10/26/2012	12:51:30 PM	Helium valve opened
10/26/2012	12:51:30 PM	Main Vac valve opened
10/26/2012	12:51:30 PM	Helium MFC set to  20.000000
10/26/2012	12:51:30 PM	H2 MFC set to  0.000000
10/26/2012	12:51:30 PM	BCl3 MFC set to  0.000000
10/26/2012	12:51:30 PM	PH3 MFC set to  0.000000
10/26/2012	12:51:30 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:51:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:51:30 PM	Tube furnace set to 0
10/26/2012	12:52:00 PM	Helium valve closed
10/26/2012	12:52:00 PM	H2 valve closed
10/26/2012	12:52:00 PM	BCl3 valve closed
10/26/2012	12:52:00 PM	PH3 valve closed
10/26/2012	12:52:00 PM	SiCl4 pre valve closed
10/26/2012	12:52:00 PM	SiCl4 post valve closed
10/26/2012	12:52:00 PM	Bypass valve closed
10/26/2012	12:52:00 PM	Bubbler valve closed
10/26/2012	12:52:00 PM	Main Vac valve opened
10/26/2012	12:52:00 PM	Helium MFC set to  0.000000
10/26/2012	12:52:00 PM	H2 MFC set to  0.000000
10/26/2012	12:52:00 PM	BCl3 MFC set to  0.000000
10/26/2012	12:52:00 PM	PH3 MFC set to  0.000000
10/26/2012	12:52:00 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:52:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:52:00 PM	Tube furnace set to 0
10/26/2012	12:52:30 PM	H2 valve closed
10/26/2012	12:52:30 PM	BCl3 valve closed
10/26/2012	12:52:30 PM	PH3 valve closed
10/26/2012	12:52:30 PM	SiCl4 pre valve closed
10/26/2012	12:52:30 PM	SiCl4 post valve closed
10/26/2012	12:52:30 PM	Bypass valve closed
10/26/2012	12:52:30 PM	Bubbler valve closed
10/26/2012	12:52:30 PM	Helium valve opened
10/26/2012	12:52:30 PM	Main Vac valve opened
10/26/2012	12:52:30 PM	Helium MFC set to  20.000000
10/26/2012	12:52:30 PM	H2 MFC set to  0.000000
10/26/2012	12:52:30 PM	BCl3 MFC set to  0.000000
10/26/2012	12:52:30 PM	PH3 MFC set to  0.000000
10/26/2012	12:52:30 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:52:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:52:31 PM	Tube furnace set to 0
10/26/2012	12:53:01 PM	Helium valve closed
10/26/2012	12:53:01 PM	H2 valve closed
10/26/2012	12:53:01 PM	BCl3 valve closed
10/26/2012	12:53:01 PM	PH3 valve closed
10/26/2012	12:53:01 PM	SiCl4 pre valve closed
10/26/2012	12:53:01 PM	SiCl4 post valve closed
10/26/2012	12:53:01 PM	Bypass valve closed
10/26/2012	12:53:01 PM	Bubbler valve closed
10/26/2012	12:53:01 PM	Main Vac valve opened
10/26/2012	12:53:01 PM	Helium MFC set to  0.000000
10/26/2012	12:53:01 PM	H2 MFC set to  0.000000
10/26/2012	12:53:01 PM	BCl3 MFC set to  0.000000
10/26/2012	12:53:01 PM	PH3 MFC set to  0.000000
10/26/2012	12:53:01 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:53:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:53:01 PM	Tube furnace set to 0
10/26/2012	12:53:31 PM	H2 valve closed
10/26/2012	12:53:31 PM	BCl3 valve closed
10/26/2012	12:53:31 PM	PH3 valve closed
10/26/2012	12:53:31 PM	SiCl4 pre valve closed
10/26/2012	12:53:31 PM	SiCl4 post valve closed
10/26/2012	12:53:31 PM	Bypass valve closed
10/26/2012	12:53:31 PM	Bubbler valve closed
10/26/2012	12:53:31 PM	Helium valve opened
10/26/2012	12:53:31 PM	Main Vac valve opened
10/26/2012	12:53:31 PM	Helium MFC set to  20.000000
10/26/2012	12:53:31 PM	H2 MFC set to  0.000000
10/26/2012	12:53:31 PM	BCl3 MFC set to  0.000000
10/26/2012	12:53:31 PM	PH3 MFC set to  0.000000
10/26/2012	12:53:31 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:53:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:53:31 PM	Tube furnace set to 0
10/26/2012	12:54:01 PM	Helium valve closed
10/26/2012	12:54:01 PM	H2 valve closed
10/26/2012	12:54:01 PM	BCl3 valve closed
10/26/2012	12:54:01 PM	PH3 valve closed
10/26/2012	12:54:01 PM	SiCl4 pre valve closed
10/26/2012	12:54:01 PM	SiCl4 post valve closed
10/26/2012	12:54:01 PM	Bypass valve closed
10/26/2012	12:54:01 PM	Bubbler valve closed
10/26/2012	12:54:01 PM	Main Vac valve opened
10/26/2012	12:54:01 PM	Helium MFC set to  0.000000
10/26/2012	12:54:01 PM	H2 MFC set to  0.000000
10/26/2012	12:54:01 PM	BCl3 MFC set to  0.000000
10/26/2012	12:54:01 PM	PH3 MFC set to  0.000000
10/26/2012	12:54:01 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:54:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:54:01 PM	Tube furnace set to 0
10/26/2012	12:54:31 PM	H2 valve closed
10/26/2012	12:54:31 PM	BCl3 valve closed
10/26/2012	12:54:31 PM	PH3 valve closed
10/26/2012	12:54:31 PM	SiCl4 pre valve closed
10/26/2012	12:54:31 PM	SiCl4 post valve closed
10/26/2012	12:54:31 PM	Bypass valve closed
10/26/2012	12:54:31 PM	Bubbler valve closed
10/26/2012	12:54:31 PM	Helium valve opened
10/26/2012	12:54:31 PM	Main Vac valve opened
10/26/2012	12:54:31 PM	Helium MFC set to  20.000000
10/26/2012	12:54:31 PM	H2 MFC set to  0.000000
10/26/2012	12:54:31 PM	BCl3 MFC set to  0.000000
10/26/2012	12:54:31 PM	PH3 MFC set to  0.000000
10/26/2012	12:54:31 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:54:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:54:32 PM	Tube furnace set to 0
10/26/2012	12:55:02 PM	Helium valve closed
10/26/2012	12:55:02 PM	H2 valve closed
10/26/2012	12:55:02 PM	BCl3 valve closed
10/26/2012	12:55:02 PM	PH3 valve closed
10/26/2012	12:55:02 PM	SiCl4 pre valve closed
10/26/2012	12:55:02 PM	SiCl4 post valve closed
10/26/2012	12:55:02 PM	Bypass valve closed
10/26/2012	12:55:02 PM	Bubbler valve closed
10/26/2012	12:55:02 PM	Main Vac valve opened
10/26/2012	12:55:02 PM	Helium MFC set to  0.000000
10/26/2012	12:55:02 PM	H2 MFC set to  0.000000
10/26/2012	12:55:02 PM	BCl3 MFC set to  0.000000
10/26/2012	12:55:02 PM	PH3 MFC set to  0.000000
10/26/2012	12:55:02 PM	SiCl4 MFC set to  0.000000
10/26/2012	12:55:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	12:55:02 PM	Tube furnace set to 0
10/26/2012	12:55:03 PM	Run finished at 12:55 PM
10/26/2012	12:55:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	1:04:04 PM	Main Vac valve closed
10/26/2012	1:04:16 PM	Main Vac valve opened
10/26/2012	1:05:06 PM	Recipe started at 1:05 PM
10/26/2012	1:05:06 PM	Helium valve closed
10/26/2012	1:05:06 PM	H2 valve closed
10/26/2012	1:05:07 PM	BCl3 valve closed
10/26/2012	1:05:07 PM	PH3 valve closed
10/26/2012	1:05:07 PM	SiCl4 pre valve closed
10/26/2012	1:05:07 PM	SiCl4 post valve closed
10/26/2012	1:05:07 PM	Main Vac valve closed
10/26/2012	1:05:07 PM	Bypass valve closed
10/26/2012	1:05:07 PM	Bubbler valve closed
10/26/2012	1:05:07 PM	Helium MFC set to  0.000000
10/26/2012	1:05:07 PM	H2 MFC set to  0.000000
10/26/2012	1:05:07 PM	BCl3 MFC set to  0.000000
10/26/2012	1:05:07 PM	PH3 MFC set to  0.000000
10/26/2012	1:05:07 PM	SiCl4 MFC set to  0.000000
10/26/2012	1:05:07 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:05:07 PM	Tube furnace set to 0
10/26/2012	1:05:10 PM	Helium valve closed
10/26/2012	1:05:10 PM	BCl3 valve closed
10/26/2012	1:05:10 PM	PH3 valve closed
10/26/2012	1:05:10 PM	SiCl4 pre valve closed
10/26/2012	1:05:10 PM	SiCl4 post valve closed
10/26/2012	1:05:10 PM	Main Vac valve closed
10/26/2012	1:05:10 PM	Bypass valve closed
10/26/2012	1:05:10 PM	Bubbler valve closed
10/26/2012	1:05:10 PM	H2 valve opened
10/26/2012	1:05:10 PM	Helium MFC set to  0.000000
10/26/2012	1:05:10 PM	H2 MFC set to  500.000000
10/26/2012	1:05:10 PM	BCl3 MFC set to  0.000000
10/26/2012	1:05:10 PM	PH3 MFC set to  0.000000
10/26/2012	1:05:10 PM	SiCl4 MFC set to  0.000000
10/26/2012	1:05:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:05:10 PM	Tube furnace set to 0
10/26/2012	1:06:27 PM	Helium valve closed
10/26/2012	1:06:27 PM	BCl3 valve closed
10/26/2012	1:06:27 PM	PH3 valve closed
10/26/2012	1:06:27 PM	SiCl4 pre valve closed
10/26/2012	1:06:27 PM	SiCl4 post valve closed
10/26/2012	1:06:27 PM	Main Vac valve closed
10/26/2012	1:06:27 PM	Bypass valve closed
10/26/2012	1:06:27 PM	H2 valve opened
10/26/2012	1:06:27 PM	Bubbler valve opened
10/26/2012	1:06:27 PM	Helium MFC set to  0.000000
10/26/2012	1:06:27 PM	H2 MFC set to  500.000000
10/26/2012	1:06:27 PM	BCl3 MFC set to  0.000000
10/26/2012	1:06:27 PM	PH3 MFC set to  0.000000
10/26/2012	1:06:27 PM	SiCl4 MFC set to  0.000000
10/26/2012	1:06:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:06:27 PM	Tube furnace set to 0
10/26/2012	1:06:28 PM	Helium valve closed
10/26/2012	1:06:28 PM	BCl3 valve closed
10/26/2012	1:06:28 PM	PH3 valve closed
10/26/2012	1:06:28 PM	SiCl4 pre valve closed
10/26/2012	1:06:28 PM	SiCl4 post valve closed
10/26/2012	1:06:28 PM	Main Vac valve closed
10/26/2012	1:06:28 PM	Bypass valve closed
10/26/2012	1:06:28 PM	H2 valve opened
10/26/2012	1:06:28 PM	Bubbler valve opened
10/26/2012	1:06:28 PM	Helium MFC set to  0.000000
10/26/2012	1:06:28 PM	H2 MFC set to  500.000000
10/26/2012	1:06:28 PM	BCl3 MFC set to  0.000000
10/26/2012	1:06:28 PM	PH3 MFC set to  0.000000
10/26/2012	1:06:28 PM	SiCl4 MFC set to  0.000000
10/26/2012	1:06:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:06:28 PM	Tube furnace set to 1000
10/26/2012	1:26:28 PM	Helium valve closed
10/26/2012	1:26:28 PM	PH3 valve closed
10/26/2012	1:26:28 PM	Main Vac valve closed
10/26/2012	1:26:28 PM	Bypass valve closed
10/26/2012	1:26:28 PM	H2 valve opened
10/26/2012	1:26:28 PM	BCl3 valve opened
10/26/2012	1:26:28 PM	SiCl4 pre valve opened
10/26/2012	1:26:28 PM	SiCl4 post valve opened
10/26/2012	1:26:28 PM	Bubbler valve opened
10/26/2012	1:26:28 PM	Helium MFC set to  0.000000
10/26/2012	1:26:29 PM	H2 MFC set to  450.000000
10/26/2012	1:26:29 PM	BCl3 MFC set to  1.000000
10/26/2012	1:26:29 PM	PH3 MFC set to  0.000000
10/26/2012	1:26:29 PM	SiCl4 MFC set to  50.000000
10/26/2012	1:26:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:26:29 PM	Tube furnace set to 1000
10/26/2012	1:46:29 PM	Helium valve closed
10/26/2012	1:46:29 PM	BCl3 valve closed
10/26/2012	1:46:29 PM	PH3 valve closed
10/26/2012	1:46:29 PM	SiCl4 pre valve closed
10/26/2012	1:46:29 PM	SiCl4 post valve closed
10/26/2012	1:46:29 PM	Main Vac valve closed
10/26/2012	1:46:29 PM	Bypass valve closed
10/26/2012	1:46:29 PM	H2 valve opened
10/26/2012	1:46:29 PM	Bubbler valve opened
10/26/2012	1:46:29 PM	Helium MFC set to  0.000000
10/26/2012	1:46:29 PM	H2 MFC set to  500.000000
10/26/2012	1:46:29 PM	BCl3 MFC set to  0.000000
10/26/2012	1:46:29 PM	PH3 MFC set to  0.000000
10/26/2012	1:46:29 PM	SiCl4 MFC set to  0.000000
10/26/2012	1:46:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:46:29 PM	Tube furnace set to 750
10/26/2012	1:51:29 PM	H2 valve closed
10/26/2012	1:51:29 PM	BCl3 valve closed
10/26/2012	1:51:29 PM	PH3 valve closed
10/26/2012	1:51:29 PM	SiCl4 pre valve closed
10/26/2012	1:51:29 PM	SiCl4 post valve closed
10/26/2012	1:51:29 PM	Main Vac valve closed
10/26/2012	1:51:29 PM	Bypass valve closed
10/26/2012	1:51:29 PM	Helium valve opened
10/26/2012	1:51:29 PM	Bubbler valve opened
10/26/2012	1:51:29 PM	Helium MFC set to  500.000000
10/26/2012	1:51:29 PM	H2 MFC set to  0.000000
10/26/2012	1:51:29 PM	BCl3 MFC set to  0.000000
10/26/2012	1:51:29 PM	PH3 MFC set to  0.000000
10/26/2012	1:51:29 PM	SiCl4 MFC set to  0.000000
10/26/2012	1:51:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	1:51:29 PM	Tube furnace set to 0
10/26/2012	2:00:41 PM	Helium valve closed
10/26/2012	2:00:41 PM	H2 valve closed
10/26/2012	2:00:41 PM	BCl3 valve closed
10/26/2012	2:00:41 PM	PH3 valve closed
10/26/2012	2:00:41 PM	SiCl4 pre valve closed
10/26/2012	2:00:41 PM	SiCl4 post valve closed
10/26/2012	2:00:41 PM	Main Vac valve closed
10/26/2012	2:00:41 PM	Bypass valve closed
10/26/2012	2:00:41 PM	Bubbler valve closed
10/26/2012	2:00:41 PM	Helium MFC set to  0.000000
10/26/2012	2:00:41 PM	H2 MFC set to  0.000000
10/26/2012	2:00:41 PM	BCl3 MFC set to  0.000000
10/26/2012	2:00:41 PM	PH3 MFC set to  0.000000
10/26/2012	2:00:41 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:00:41 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:00:42 PM	Tube furnace set to 0
10/26/2012	2:00:43 PM	Run finished at 2:00 PM
10/26/2012	2:00:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	2:00:46 PM	Recipe started at 2:00 PM
10/26/2012	2:00:46 PM	Helium valve closed
10/26/2012	2:00:46 PM	H2 valve closed
10/26/2012	2:00:46 PM	BCl3 valve closed
10/26/2012	2:00:46 PM	PH3 valve closed
10/26/2012	2:00:46 PM	SiCl4 pre valve closed
10/26/2012	2:00:46 PM	SiCl4 post valve closed
10/26/2012	2:00:46 PM	Main Vac valve closed
10/26/2012	2:00:47 PM	Bypass valve closed
10/26/2012	2:00:47 PM	Bubbler valve closed
10/26/2012	2:00:47 PM	Helium MFC set to  0.000000
10/26/2012	2:00:47 PM	H2 MFC set to  0.000000
10/26/2012	2:00:47 PM	BCl3 MFC set to  0.000000
10/26/2012	2:00:47 PM	PH3 MFC set to  0.000000
10/26/2012	2:00:47 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:00:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:00:47 PM	Tube furnace set to 0
10/26/2012	2:00:50 PM	H2 valve closed
10/26/2012	2:00:50 PM	BCl3 valve closed
10/26/2012	2:00:50 PM	PH3 valve closed
10/26/2012	2:00:50 PM	SiCl4 pre valve closed
10/26/2012	2:00:50 PM	SiCl4 post valve closed
10/26/2012	2:00:50 PM	Main Vac valve closed
10/26/2012	2:00:50 PM	Bypass valve closed
10/26/2012	2:00:50 PM	Bubbler valve closed
10/26/2012	2:00:50 PM	Helium valve opened
10/26/2012	2:00:50 PM	Helium MFC set to  500.000000
10/26/2012	2:00:50 PM	H2 MFC set to  0.000000
10/26/2012	2:00:50 PM	BCl3 MFC set to  0.000000
10/26/2012	2:00:50 PM	PH3 MFC set to  0.000000
10/26/2012	2:00:50 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:00:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:00:50 PM	Tube furnace set to 0
10/26/2012	2:00:50 PM	Helium valve closed
10/26/2012	2:00:50 PM	H2 valve closed
10/26/2012	2:00:50 PM	BCl3 valve closed
10/26/2012	2:00:50 PM	PH3 valve closed
10/26/2012	2:00:50 PM	SiCl4 pre valve closed
10/26/2012	2:00:50 PM	SiCl4 post valve closed
10/26/2012	2:00:50 PM	Main Vac valve closed
10/26/2012	2:00:50 PM	Bypass valve closed
10/26/2012	2:00:50 PM	Bubbler valve closed
10/26/2012	2:00:50 PM	Helium MFC set to  0.000000
10/26/2012	2:00:50 PM	H2 MFC set to  0.000000
10/26/2012	2:00:50 PM	BCl3 MFC set to  0.000000
10/26/2012	2:00:50 PM	PH3 MFC set to  0.000000
10/26/2012	2:00:50 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:00:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:00:50 PM	Tube furnace set to 0
10/26/2012	2:00:51 PM	Run finished at 2:00 PM
10/26/2012	2:00:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	2:12:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	2:12:40 PM	Recipe started at 2:12 PM
10/26/2012	2:12:40 PM	Helium valve closed
10/26/2012	2:12:40 PM	H2 valve closed
10/26/2012	2:12:40 PM	BCl3 valve closed
10/26/2012	2:12:40 PM	PH3 valve closed
10/26/2012	2:12:40 PM	SiCl4 pre valve closed
10/26/2012	2:12:40 PM	SiCl4 post valve closed
10/26/2012	2:12:40 PM	Main Vac valve closed
10/26/2012	2:12:40 PM	Bubbler valve closed
10/26/2012	2:12:40 PM	Bypass valve opened
10/26/2012	2:12:40 PM	Helium MFC set to  0.000000
10/26/2012	2:12:40 PM	H2 MFC set to  0.000000
10/26/2012	2:12:40 PM	BCl3 MFC set to  0.000000
10/26/2012	2:12:40 PM	PH3 MFC set to  0.000000
10/26/2012	2:12:40 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:12:40 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:12:40 PM	Tube furnace set to 0
10/26/2012	2:14:12 PM	Helium valve closed
10/26/2012	2:14:12 PM	H2 valve closed
10/26/2012	2:14:12 PM	BCl3 valve closed
10/26/2012	2:14:12 PM	PH3 valve closed
10/26/2012	2:14:12 PM	SiCl4 pre valve closed
10/26/2012	2:14:12 PM	SiCl4 post valve closed
10/26/2012	2:14:12 PM	Main Vac valve closed
10/26/2012	2:14:12 PM	Bubbler valve closed
10/26/2012	2:14:12 PM	Bypass valve opened
10/26/2012	2:14:12 PM	Helium MFC set to  0.000000
10/26/2012	2:14:12 PM	H2 MFC set to  0.000000
10/26/2012	2:14:12 PM	BCl3 MFC set to  0.000000
10/26/2012	2:14:12 PM	PH3 MFC set to  0.000000
10/26/2012	2:14:12 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:14:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:14:12 PM	Tube furnace set to 0
10/26/2012	2:14:26 PM	Helium valve closed
10/26/2012	2:14:26 PM	H2 valve closed
10/26/2012	2:14:26 PM	BCl3 valve closed
10/26/2012	2:14:26 PM	PH3 valve closed
10/26/2012	2:14:26 PM	SiCl4 pre valve closed
10/26/2012	2:14:26 PM	SiCl4 post valve closed
10/26/2012	2:14:26 PM	Bypass valve closed
10/26/2012	2:14:26 PM	Bubbler valve closed
10/26/2012	2:14:26 PM	Main Vac valve opened
10/26/2012	2:14:26 PM	Helium MFC set to  0.000000
10/26/2012	2:14:26 PM	H2 MFC set to  0.000000
10/26/2012	2:14:26 PM	BCl3 MFC set to  0.000000
10/26/2012	2:14:26 PM	PH3 MFC set to  0.000000
10/26/2012	2:14:26 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:14:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:14:26 PM	Tube furnace set to 0
10/26/2012	2:14:27 PM	Run finished at 2:14 PM
10/26/2012	2:14:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	2:14:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	2:14:30 PM	Recipe started at 2:14 PM
10/26/2012	2:14:30 PM	Helium valve closed
10/26/2012	2:14:30 PM	H2 valve closed
10/26/2012	2:14:30 PM	BCl3 valve closed
10/26/2012	2:14:30 PM	PH3 valve closed
10/26/2012	2:14:30 PM	SiCl4 pre valve closed
10/26/2012	2:14:30 PM	SiCl4 post valve closed
10/26/2012	2:14:30 PM	Main Vac valve closed
10/26/2012	2:14:30 PM	Bypass valve closed
10/26/2012	2:14:30 PM	Bubbler valve closed
10/26/2012	2:14:30 PM	Helium MFC set to  0.000000
10/26/2012	2:14:30 PM	H2 MFC set to  0.000000
10/26/2012	2:14:30 PM	BCl3 MFC set to  0.000000
10/26/2012	2:14:30 PM	PH3 MFC set to  0.000000
10/26/2012	2:14:30 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:14:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:14:30 PM	Tube furnace set to 0
10/26/2012	2:14:33 PM	H2 valve closed
10/26/2012	2:14:33 PM	BCl3 valve closed
10/26/2012	2:14:33 PM	PH3 valve closed
10/26/2012	2:14:33 PM	SiCl4 pre valve closed
10/26/2012	2:14:33 PM	SiCl4 post valve closed
10/26/2012	2:14:33 PM	Main Vac valve closed
10/26/2012	2:14:33 PM	Bypass valve closed
10/26/2012	2:14:33 PM	Bubbler valve closed
10/26/2012	2:14:33 PM	Helium valve opened
10/26/2012	2:14:33 PM	Helium MFC set to  500.000000
10/26/2012	2:14:33 PM	H2 MFC set to  0.000000
10/26/2012	2:14:33 PM	BCl3 MFC set to  0.000000
10/26/2012	2:14:33 PM	PH3 MFC set to  0.000000
10/26/2012	2:14:33 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:14:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:14:33 PM	Tube furnace set to 0
10/26/2012	2:15:46 PM	Helium valve closed
10/26/2012	2:15:46 PM	H2 valve closed
10/26/2012	2:15:46 PM	BCl3 valve closed
10/26/2012	2:15:46 PM	PH3 valve closed
10/26/2012	2:15:46 PM	SiCl4 pre valve closed
10/26/2012	2:15:46 PM	SiCl4 post valve closed
10/26/2012	2:15:46 PM	Main Vac valve closed
10/26/2012	2:15:46 PM	Bypass valve closed
10/26/2012	2:15:46 PM	Bubbler valve closed
10/26/2012	2:15:46 PM	Helium MFC set to  0.000000
10/26/2012	2:15:46 PM	H2 MFC set to  0.000000
10/26/2012	2:15:46 PM	BCl3 MFC set to  0.000000
10/26/2012	2:15:46 PM	PH3 MFC set to  0.000000
10/26/2012	2:15:46 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:15:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:15:46 PM	Tube furnace set to 0
10/26/2012	2:15:47 PM	Run finished at 2:15 PM
10/26/2012	2:15:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	2:19:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	2:19:05 PM	Recipe started at 2:19 PM
10/26/2012	2:19:05 PM	Helium valve closed
10/26/2012	2:19:05 PM	H2 valve closed
10/26/2012	2:19:05 PM	BCl3 valve closed
10/26/2012	2:19:05 PM	PH3 valve closed
10/26/2012	2:19:05 PM	SiCl4 pre valve closed
10/26/2012	2:19:05 PM	SiCl4 post valve closed
10/26/2012	2:19:05 PM	Main Vac valve closed
10/26/2012	2:19:05 PM	Bubbler valve closed
10/26/2012	2:19:05 PM	Bypass valve opened
10/26/2012	2:19:05 PM	Helium MFC set to  0.000000
10/26/2012	2:19:05 PM	H2 MFC set to  0.000000
10/26/2012	2:19:05 PM	BCl3 MFC set to  0.000000
10/26/2012	2:19:05 PM	PH3 MFC set to  0.000000
10/26/2012	2:19:05 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:19:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:19:06 PM	Tube furnace set to 0
10/26/2012	2:20:30 PM	Helium valve closed
10/26/2012	2:20:30 PM	H2 valve closed
10/26/2012	2:20:30 PM	BCl3 valve closed
10/26/2012	2:20:30 PM	PH3 valve closed
10/26/2012	2:20:30 PM	SiCl4 pre valve closed
10/26/2012	2:20:30 PM	SiCl4 post valve closed
10/26/2012	2:20:30 PM	Main Vac valve closed
10/26/2012	2:20:30 PM	Bubbler valve closed
10/26/2012	2:20:30 PM	Bypass valve opened
10/26/2012	2:20:30 PM	Helium MFC set to  0.000000
10/26/2012	2:20:30 PM	H2 MFC set to  0.000000
10/26/2012	2:20:30 PM	BCl3 MFC set to  0.000000
10/26/2012	2:20:30 PM	PH3 MFC set to  0.000000
10/26/2012	2:20:30 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:20:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:20:31 PM	Tube furnace set to 0
10/26/2012	2:21:31 PM	Helium valve closed
10/26/2012	2:21:31 PM	H2 valve closed
10/26/2012	2:21:31 PM	BCl3 valve closed
10/26/2012	2:21:31 PM	PH3 valve closed
10/26/2012	2:21:31 PM	SiCl4 pre valve closed
10/26/2012	2:21:31 PM	SiCl4 post valve closed
10/26/2012	2:21:31 PM	Bypass valve closed
10/26/2012	2:21:31 PM	Bubbler valve closed
10/26/2012	2:21:31 PM	Main Vac valve opened
10/26/2012	2:21:31 PM	Helium MFC set to  0.000000
10/26/2012	2:21:31 PM	H2 MFC set to  0.000000
10/26/2012	2:21:31 PM	BCl3 MFC set to  0.000000
10/26/2012	2:21:31 PM	PH3 MFC set to  0.000000
10/26/2012	2:21:31 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:21:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:21:31 PM	Tube furnace set to 0
10/26/2012	2:21:32 PM	Run finished at 2:21 PM
10/26/2012	2:21:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	2:41:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	2:41:22 PM	Recipe started at 2:41 PM
10/26/2012	2:41:23 PM	Helium valve closed
10/26/2012	2:41:23 PM	H2 valve closed
10/26/2012	2:41:23 PM	BCl3 valve closed
10/26/2012	2:41:23 PM	PH3 valve closed
10/26/2012	2:41:23 PM	SiCl4 pre valve closed
10/26/2012	2:41:23 PM	SiCl4 post valve closed
10/26/2012	2:41:23 PM	Main Vac valve closed
10/26/2012	2:41:23 PM	Bubbler valve closed
10/26/2012	2:41:23 PM	Bypass valve opened
10/26/2012	2:41:23 PM	Helium MFC set to  0.000000
10/26/2012	2:41:23 PM	H2 MFC set to  0.000000
10/26/2012	2:41:23 PM	BCl3 MFC set to  0.000000
10/26/2012	2:41:23 PM	PH3 MFC set to  0.000000
10/26/2012	2:41:23 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:41:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:41:23 PM	Tube furnace set to 0
10/26/2012	2:41:23 PM	Helium valve closed
10/26/2012	2:41:23 PM	H2 valve closed
10/26/2012	2:41:23 PM	BCl3 valve closed
10/26/2012	2:41:23 PM	PH3 valve closed
10/26/2012	2:41:23 PM	SiCl4 pre valve closed
10/26/2012	2:41:23 PM	SiCl4 post valve closed
10/26/2012	2:41:23 PM	Main Vac valve closed
10/26/2012	2:41:23 PM	Bubbler valve closed
10/26/2012	2:41:23 PM	Bypass valve opened
10/26/2012	2:41:23 PM	Helium MFC set to  0.000000
10/26/2012	2:41:23 PM	H2 MFC set to  0.000000
10/26/2012	2:41:23 PM	BCl3 MFC set to  0.000000
10/26/2012	2:41:23 PM	PH3 MFC set to  0.000000
10/26/2012	2:41:23 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:41:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:41:23 PM	Tube furnace set to 0
10/26/2012	2:41:30 PM	Helium valve closed
10/26/2012	2:41:30 PM	H2 valve closed
10/26/2012	2:41:30 PM	BCl3 valve closed
10/26/2012	2:41:30 PM	PH3 valve closed
10/26/2012	2:41:30 PM	SiCl4 pre valve closed
10/26/2012	2:41:30 PM	SiCl4 post valve closed
10/26/2012	2:41:30 PM	Bypass valve closed
10/26/2012	2:41:30 PM	Bubbler valve closed
10/26/2012	2:41:30 PM	Main Vac valve opened
10/26/2012	2:41:30 PM	Helium MFC set to  0.000000
10/26/2012	2:41:30 PM	H2 MFC set to  0.000000
10/26/2012	2:41:30 PM	BCl3 MFC set to  0.000000
10/26/2012	2:41:30 PM	PH3 MFC set to  0.000000
10/26/2012	2:41:30 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:41:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:41:30 PM	Tube furnace set to 0
10/26/2012	2:42:00 PM	H2 valve closed
10/26/2012	2:42:00 PM	BCl3 valve closed
10/26/2012	2:42:00 PM	PH3 valve closed
10/26/2012	2:42:00 PM	SiCl4 pre valve closed
10/26/2012	2:42:00 PM	SiCl4 post valve closed
10/26/2012	2:42:00 PM	Bypass valve closed
10/26/2012	2:42:00 PM	Bubbler valve closed
10/26/2012	2:42:00 PM	Helium valve opened
10/26/2012	2:42:00 PM	Main Vac valve opened
10/26/2012	2:42:00 PM	Helium MFC set to  20.000000
10/26/2012	2:42:00 PM	H2 MFC set to  0.000000
10/26/2012	2:42:00 PM	BCl3 MFC set to  0.000000
10/26/2012	2:42:00 PM	PH3 MFC set to  0.000000
10/26/2012	2:42:00 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:42:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:42:00 PM	Tube furnace set to 0
10/26/2012	2:42:30 PM	Helium valve closed
10/26/2012	2:42:31 PM	H2 valve closed
10/26/2012	2:42:31 PM	BCl3 valve closed
10/26/2012	2:42:31 PM	PH3 valve closed
10/26/2012	2:42:31 PM	SiCl4 pre valve closed
10/26/2012	2:42:31 PM	SiCl4 post valve closed
10/26/2012	2:42:31 PM	Bypass valve closed
10/26/2012	2:42:31 PM	Bubbler valve closed
10/26/2012	2:42:31 PM	Main Vac valve opened
10/26/2012	2:42:31 PM	Helium MFC set to  0.000000
10/26/2012	2:42:31 PM	H2 MFC set to  0.000000
10/26/2012	2:42:31 PM	BCl3 MFC set to  0.000000
10/26/2012	2:42:31 PM	PH3 MFC set to  0.000000
10/26/2012	2:42:31 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:42:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:42:31 PM	Tube furnace set to 0
10/26/2012	2:43:01 PM	H2 valve closed
10/26/2012	2:43:01 PM	BCl3 valve closed
10/26/2012	2:43:01 PM	PH3 valve closed
10/26/2012	2:43:01 PM	SiCl4 pre valve closed
10/26/2012	2:43:01 PM	SiCl4 post valve closed
10/26/2012	2:43:01 PM	Bypass valve closed
10/26/2012	2:43:01 PM	Bubbler valve closed
10/26/2012	2:43:01 PM	Helium valve opened
10/26/2012	2:43:01 PM	Main Vac valve opened
10/26/2012	2:43:01 PM	Helium MFC set to  20.000000
10/26/2012	2:43:01 PM	H2 MFC set to  0.000000
10/26/2012	2:43:01 PM	BCl3 MFC set to  0.000000
10/26/2012	2:43:01 PM	PH3 MFC set to  0.000000
10/26/2012	2:43:01 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:43:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:43:01 PM	Tube furnace set to 0
10/26/2012	2:43:31 PM	Helium valve closed
10/26/2012	2:43:31 PM	H2 valve closed
10/26/2012	2:43:31 PM	BCl3 valve closed
10/26/2012	2:43:31 PM	PH3 valve closed
10/26/2012	2:43:31 PM	SiCl4 pre valve closed
10/26/2012	2:43:31 PM	SiCl4 post valve closed
10/26/2012	2:43:31 PM	Bypass valve closed
10/26/2012	2:43:31 PM	Bubbler valve closed
10/26/2012	2:43:31 PM	Main Vac valve opened
10/26/2012	2:43:31 PM	Helium MFC set to  0.000000
10/26/2012	2:43:31 PM	H2 MFC set to  0.000000
10/26/2012	2:43:31 PM	BCl3 MFC set to  0.000000
10/26/2012	2:43:31 PM	PH3 MFC set to  0.000000
10/26/2012	2:43:31 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:43:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:43:31 PM	Tube furnace set to 0
10/26/2012	2:44:01 PM	H2 valve closed
10/26/2012	2:44:01 PM	BCl3 valve closed
10/26/2012	2:44:01 PM	PH3 valve closed
10/26/2012	2:44:01 PM	SiCl4 pre valve closed
10/26/2012	2:44:01 PM	SiCl4 post valve closed
10/26/2012	2:44:01 PM	Bypass valve closed
10/26/2012	2:44:01 PM	Bubbler valve closed
10/26/2012	2:44:01 PM	Helium valve opened
10/26/2012	2:44:01 PM	Main Vac valve opened
10/26/2012	2:44:01 PM	Helium MFC set to  20.000000
10/26/2012	2:44:01 PM	H2 MFC set to  0.000000
10/26/2012	2:44:01 PM	BCl3 MFC set to  0.000000
10/26/2012	2:44:01 PM	PH3 MFC set to  0.000000
10/26/2012	2:44:01 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:44:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:44:01 PM	Tube furnace set to 0
10/26/2012	2:44:31 PM	Helium valve closed
10/26/2012	2:44:32 PM	H2 valve closed
10/26/2012	2:44:32 PM	BCl3 valve closed
10/26/2012	2:44:32 PM	PH3 valve closed
10/26/2012	2:44:32 PM	SiCl4 pre valve closed
10/26/2012	2:44:32 PM	SiCl4 post valve closed
10/26/2012	2:44:32 PM	Bypass valve closed
10/26/2012	2:44:32 PM	Bubbler valve closed
10/26/2012	2:44:32 PM	Main Vac valve opened
10/26/2012	2:44:32 PM	Helium MFC set to  0.000000
10/26/2012	2:44:32 PM	H2 MFC set to  0.000000
10/26/2012	2:44:32 PM	BCl3 MFC set to  0.000000
10/26/2012	2:44:32 PM	PH3 MFC set to  0.000000
10/26/2012	2:44:32 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:44:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:44:32 PM	Tube furnace set to 0
10/26/2012	2:45:02 PM	H2 valve closed
10/26/2012	2:45:02 PM	BCl3 valve closed
10/26/2012	2:45:02 PM	PH3 valve closed
10/26/2012	2:45:02 PM	SiCl4 pre valve closed
10/26/2012	2:45:02 PM	SiCl4 post valve closed
10/26/2012	2:45:02 PM	Bypass valve closed
10/26/2012	2:45:02 PM	Bubbler valve closed
10/26/2012	2:45:02 PM	Helium valve opened
10/26/2012	2:45:02 PM	Main Vac valve opened
10/26/2012	2:45:02 PM	Helium MFC set to  20.000000
10/26/2012	2:45:02 PM	H2 MFC set to  0.000000
10/26/2012	2:45:02 PM	BCl3 MFC set to  0.000000
10/26/2012	2:45:02 PM	PH3 MFC set to  0.000000
10/26/2012	2:45:02 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:45:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:45:02 PM	Tube furnace set to 0
10/26/2012	2:45:32 PM	Helium valve closed
10/26/2012	2:45:32 PM	H2 valve closed
10/26/2012	2:45:32 PM	BCl3 valve closed
10/26/2012	2:45:32 PM	PH3 valve closed
10/26/2012	2:45:32 PM	SiCl4 pre valve closed
10/26/2012	2:45:32 PM	SiCl4 post valve closed
10/26/2012	2:45:32 PM	Bypass valve closed
10/26/2012	2:45:32 PM	Bubbler valve closed
10/26/2012	2:45:32 PM	Main Vac valve opened
10/26/2012	2:45:32 PM	Helium MFC set to  0.000000
10/26/2012	2:45:32 PM	H2 MFC set to  0.000000
10/26/2012	2:45:32 PM	BCl3 MFC set to  0.000000
10/26/2012	2:45:32 PM	PH3 MFC set to  0.000000
10/26/2012	2:45:32 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:45:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:45:32 PM	Tube furnace set to 0
10/26/2012	2:46:02 PM	H2 valve closed
10/26/2012	2:46:02 PM	BCl3 valve closed
10/26/2012	2:46:02 PM	PH3 valve closed
10/26/2012	2:46:02 PM	SiCl4 pre valve closed
10/26/2012	2:46:02 PM	SiCl4 post valve closed
10/26/2012	2:46:02 PM	Bypass valve closed
10/26/2012	2:46:02 PM	Bubbler valve closed
10/26/2012	2:46:02 PM	Helium valve opened
10/26/2012	2:46:02 PM	Main Vac valve opened
10/26/2012	2:46:02 PM	Helium MFC set to  20.000000
10/26/2012	2:46:02 PM	H2 MFC set to  0.000000
10/26/2012	2:46:02 PM	BCl3 MFC set to  0.000000
10/26/2012	2:46:02 PM	PH3 MFC set to  0.000000
10/26/2012	2:46:02 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:46:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:46:02 PM	Tube furnace set to 0
10/26/2012	2:46:32 PM	Helium valve closed
10/26/2012	2:46:32 PM	H2 valve closed
10/26/2012	2:46:32 PM	BCl3 valve closed
10/26/2012	2:46:33 PM	PH3 valve closed
10/26/2012	2:46:33 PM	SiCl4 pre valve closed
10/26/2012	2:46:33 PM	SiCl4 post valve closed
10/26/2012	2:46:33 PM	Bypass valve closed
10/26/2012	2:46:33 PM	Bubbler valve closed
10/26/2012	2:46:33 PM	Main Vac valve opened
10/26/2012	2:46:33 PM	Helium MFC set to  0.000000
10/26/2012	2:46:33 PM	H2 MFC set to  0.000000
10/26/2012	2:46:33 PM	BCl3 MFC set to  0.000000
10/26/2012	2:46:33 PM	PH3 MFC set to  0.000000
10/26/2012	2:46:33 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:46:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:46:33 PM	Tube furnace set to 0
10/26/2012	2:47:03 PM	H2 valve closed
10/26/2012	2:47:03 PM	BCl3 valve closed
10/26/2012	2:47:03 PM	PH3 valve closed
10/26/2012	2:47:03 PM	SiCl4 pre valve closed
10/26/2012	2:47:03 PM	SiCl4 post valve closed
10/26/2012	2:47:03 PM	Bypass valve closed
10/26/2012	2:47:03 PM	Bubbler valve closed
10/26/2012	2:47:03 PM	Helium valve opened
10/26/2012	2:47:03 PM	Main Vac valve opened
10/26/2012	2:47:03 PM	Helium MFC set to  20.000000
10/26/2012	2:47:03 PM	H2 MFC set to  0.000000
10/26/2012	2:47:03 PM	BCl3 MFC set to  0.000000
10/26/2012	2:47:03 PM	PH3 MFC set to  0.000000
10/26/2012	2:47:03 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:47:03 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:47:03 PM	Tube furnace set to 0
10/26/2012	2:47:33 PM	Helium valve closed
10/26/2012	2:47:33 PM	H2 valve closed
10/26/2012	2:47:33 PM	BCl3 valve closed
10/26/2012	2:47:33 PM	PH3 valve closed
10/26/2012	2:47:33 PM	SiCl4 pre valve closed
10/26/2012	2:47:33 PM	SiCl4 post valve closed
10/26/2012	2:47:33 PM	Bypass valve closed
10/26/2012	2:47:33 PM	Bubbler valve closed
10/26/2012	2:47:33 PM	Main Vac valve opened
10/26/2012	2:47:33 PM	Helium MFC set to  0.000000
10/26/2012	2:47:33 PM	H2 MFC set to  0.000000
10/26/2012	2:47:33 PM	BCl3 MFC set to  0.000000
10/26/2012	2:47:33 PM	PH3 MFC set to  0.000000
10/26/2012	2:47:33 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:47:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:47:33 PM	Tube furnace set to 0
10/26/2012	2:48:03 PM	H2 valve closed
10/26/2012	2:48:03 PM	BCl3 valve closed
10/26/2012	2:48:03 PM	PH3 valve closed
10/26/2012	2:48:03 PM	SiCl4 pre valve closed
10/26/2012	2:48:03 PM	SiCl4 post valve closed
10/26/2012	2:48:03 PM	Bypass valve closed
10/26/2012	2:48:03 PM	Bubbler valve closed
10/26/2012	2:48:03 PM	Helium valve opened
10/26/2012	2:48:03 PM	Main Vac valve opened
10/26/2012	2:48:03 PM	Helium MFC set to  20.000000
10/26/2012	2:48:03 PM	H2 MFC set to  0.000000
10/26/2012	2:48:03 PM	BCl3 MFC set to  0.000000
10/26/2012	2:48:03 PM	PH3 MFC set to  0.000000
10/26/2012	2:48:03 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:48:03 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:48:03 PM	Tube furnace set to 0
10/26/2012	2:48:33 PM	Helium valve closed
10/26/2012	2:48:33 PM	H2 valve closed
10/26/2012	2:48:33 PM	BCl3 valve closed
10/26/2012	2:48:33 PM	PH3 valve closed
10/26/2012	2:48:33 PM	SiCl4 pre valve closed
10/26/2012	2:48:33 PM	SiCl4 post valve closed
10/26/2012	2:48:33 PM	Bypass valve closed
10/26/2012	2:48:34 PM	Bubbler valve closed
10/26/2012	2:48:34 PM	Main Vac valve opened
10/26/2012	2:48:34 PM	Helium MFC set to  0.000000
10/26/2012	2:48:34 PM	H2 MFC set to  0.000000
10/26/2012	2:48:34 PM	BCl3 MFC set to  0.000000
10/26/2012	2:48:34 PM	PH3 MFC set to  0.000000
10/26/2012	2:48:34 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:48:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:48:34 PM	Tube furnace set to 0
10/26/2012	2:49:04 PM	H2 valve closed
10/26/2012	2:49:04 PM	BCl3 valve closed
10/26/2012	2:49:04 PM	PH3 valve closed
10/26/2012	2:49:04 PM	SiCl4 pre valve closed
10/26/2012	2:49:04 PM	SiCl4 post valve closed
10/26/2012	2:49:04 PM	Bypass valve closed
10/26/2012	2:49:04 PM	Bubbler valve closed
10/26/2012	2:49:04 PM	Helium valve opened
10/26/2012	2:49:04 PM	Main Vac valve opened
10/26/2012	2:49:04 PM	Helium MFC set to  20.000000
10/26/2012	2:49:04 PM	H2 MFC set to  0.000000
10/26/2012	2:49:04 PM	BCl3 MFC set to  0.000000
10/26/2012	2:49:04 PM	PH3 MFC set to  0.000000
10/26/2012	2:49:04 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:49:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:49:04 PM	Tube furnace set to 0
10/26/2012	2:49:34 PM	Helium valve closed
10/26/2012	2:49:34 PM	H2 valve closed
10/26/2012	2:49:34 PM	BCl3 valve closed
10/26/2012	2:49:34 PM	PH3 valve closed
10/26/2012	2:49:34 PM	SiCl4 pre valve closed
10/26/2012	2:49:34 PM	SiCl4 post valve closed
10/26/2012	2:49:34 PM	Bypass valve closed
10/26/2012	2:49:34 PM	Bubbler valve closed
10/26/2012	2:49:34 PM	Main Vac valve opened
10/26/2012	2:49:34 PM	Helium MFC set to  0.000000
10/26/2012	2:49:34 PM	H2 MFC set to  0.000000
10/26/2012	2:49:34 PM	BCl3 MFC set to  0.000000
10/26/2012	2:49:34 PM	PH3 MFC set to  0.000000
10/26/2012	2:49:34 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:49:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:49:34 PM	Tube furnace set to 0
10/26/2012	2:50:04 PM	H2 valve closed
10/26/2012	2:50:04 PM	BCl3 valve closed
10/26/2012	2:50:04 PM	PH3 valve closed
10/26/2012	2:50:04 PM	SiCl4 pre valve closed
10/26/2012	2:50:04 PM	SiCl4 post valve closed
10/26/2012	2:50:04 PM	Bypass valve closed
10/26/2012	2:50:04 PM	Bubbler valve closed
10/26/2012	2:50:04 PM	Helium valve opened
10/26/2012	2:50:04 PM	Main Vac valve opened
10/26/2012	2:50:04 PM	Helium MFC set to  20.000000
10/26/2012	2:50:04 PM	H2 MFC set to  0.000000
10/26/2012	2:50:04 PM	BCl3 MFC set to  0.000000
10/26/2012	2:50:04 PM	PH3 MFC set to  0.000000
10/26/2012	2:50:04 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:50:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:50:04 PM	Tube furnace set to 0
10/26/2012	2:50:34 PM	Helium valve closed
10/26/2012	2:50:34 PM	H2 valve closed
10/26/2012	2:50:34 PM	BCl3 valve closed
10/26/2012	2:50:34 PM	PH3 valve closed
10/26/2012	2:50:34 PM	SiCl4 pre valve closed
10/26/2012	2:50:34 PM	SiCl4 post valve closed
10/26/2012	2:50:34 PM	Bypass valve closed
10/26/2012	2:50:34 PM	Bubbler valve closed
10/26/2012	2:50:34 PM	Main Vac valve opened
10/26/2012	2:50:34 PM	Helium MFC set to  0.000000
10/26/2012	2:50:35 PM	H2 MFC set to  0.000000
10/26/2012	2:50:35 PM	BCl3 MFC set to  0.000000
10/26/2012	2:50:35 PM	PH3 MFC set to  0.000000
10/26/2012	2:50:35 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:50:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:50:35 PM	Tube furnace set to 0
10/26/2012	2:51:05 PM	H2 valve closed
10/26/2012	2:51:05 PM	BCl3 valve closed
10/26/2012	2:51:05 PM	PH3 valve closed
10/26/2012	2:51:05 PM	SiCl4 pre valve closed
10/26/2012	2:51:05 PM	SiCl4 post valve closed
10/26/2012	2:51:05 PM	Bypass valve closed
10/26/2012	2:51:05 PM	Bubbler valve closed
10/26/2012	2:51:05 PM	Helium valve opened
10/26/2012	2:51:05 PM	Main Vac valve opened
10/26/2012	2:51:05 PM	Helium MFC set to  20.000000
10/26/2012	2:51:05 PM	H2 MFC set to  0.000000
10/26/2012	2:51:05 PM	BCl3 MFC set to  0.000000
10/26/2012	2:51:05 PM	PH3 MFC set to  0.000000
10/26/2012	2:51:05 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:51:05 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:51:05 PM	Tube furnace set to 0
10/26/2012	2:51:35 PM	Helium valve closed
10/26/2012	2:51:35 PM	H2 valve closed
10/26/2012	2:51:35 PM	BCl3 valve closed
10/26/2012	2:51:35 PM	PH3 valve closed
10/26/2012	2:51:35 PM	SiCl4 pre valve closed
10/26/2012	2:51:35 PM	SiCl4 post valve closed
10/26/2012	2:51:35 PM	Bypass valve closed
10/26/2012	2:51:35 PM	Bubbler valve closed
10/26/2012	2:51:35 PM	Main Vac valve opened
10/26/2012	2:51:35 PM	Helium MFC set to  0.000000
10/26/2012	2:51:35 PM	H2 MFC set to  0.000000
10/26/2012	2:51:35 PM	BCl3 MFC set to  0.000000
10/26/2012	2:51:35 PM	PH3 MFC set to  0.000000
10/26/2012	2:51:35 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:51:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:51:35 PM	Tube furnace set to 0
10/26/2012	2:51:36 PM	Run finished at 2:51 PM
10/26/2012	2:51:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	2:52:34 PM	Main Vac valve closed
10/26/2012	2:52:46 PM	Main Vac valve opened
10/26/2012	2:54:21 PM	Recipe started at 2:54 PM
10/26/2012	2:54:21 PM	Helium valve closed
10/26/2012	2:54:21 PM	H2 valve closed
10/26/2012	2:54:21 PM	BCl3 valve closed
10/26/2012	2:54:21 PM	PH3 valve closed
10/26/2012	2:54:21 PM	SiCl4 pre valve closed
10/26/2012	2:54:21 PM	SiCl4 post valve closed
10/26/2012	2:54:21 PM	Main Vac valve closed
10/26/2012	2:54:21 PM	Bypass valve closed
10/26/2012	2:54:21 PM	Bubbler valve closed
10/26/2012	2:54:21 PM	Helium MFC set to  0.000000
10/26/2012	2:54:21 PM	H2 MFC set to  0.000000
10/26/2012	2:54:22 PM	BCl3 MFC set to  0.000000
10/26/2012	2:54:22 PM	PH3 MFC set to  0.000000
10/26/2012	2:54:22 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:54:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:54:22 PM	Tube furnace set to 0
10/26/2012	2:54:25 PM	Helium valve closed
10/26/2012	2:54:25 PM	BCl3 valve closed
10/26/2012	2:54:25 PM	PH3 valve closed
10/26/2012	2:54:25 PM	SiCl4 pre valve closed
10/26/2012	2:54:25 PM	SiCl4 post valve closed
10/26/2012	2:54:25 PM	Main Vac valve closed
10/26/2012	2:54:25 PM	Bypass valve closed
10/26/2012	2:54:25 PM	Bubbler valve closed
10/26/2012	2:54:25 PM	H2 valve opened
10/26/2012	2:54:25 PM	Helium MFC set to  0.000000
10/26/2012	2:54:25 PM	H2 MFC set to  500.000000
10/26/2012	2:54:25 PM	BCl3 MFC set to  0.000000
10/26/2012	2:54:25 PM	PH3 MFC set to  0.000000
10/26/2012	2:54:25 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:54:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:54:25 PM	Tube furnace set to 0
10/26/2012	2:55:41 PM	Helium valve closed
10/26/2012	2:55:41 PM	BCl3 valve closed
10/26/2012	2:55:41 PM	PH3 valve closed
10/26/2012	2:55:41 PM	SiCl4 pre valve closed
10/26/2012	2:55:41 PM	SiCl4 post valve closed
10/26/2012	2:55:41 PM	Main Vac valve closed
10/26/2012	2:55:41 PM	Bypass valve closed
10/26/2012	2:55:41 PM	H2 valve opened
10/26/2012	2:55:41 PM	Bubbler valve opened
10/26/2012	2:55:41 PM	Helium MFC set to  0.000000
10/26/2012	2:55:41 PM	H2 MFC set to  500.000000
10/26/2012	2:55:41 PM	BCl3 MFC set to  0.000000
10/26/2012	2:55:41 PM	PH3 MFC set to  0.000000
10/26/2012	2:55:41 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:55:41 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:55:41 PM	Tube furnace set to 0
10/26/2012	2:55:42 PM	Helium valve closed
10/26/2012	2:55:42 PM	BCl3 valve closed
10/26/2012	2:55:42 PM	PH3 valve closed
10/26/2012	2:55:42 PM	SiCl4 pre valve closed
10/26/2012	2:55:42 PM	SiCl4 post valve closed
10/26/2012	2:55:42 PM	Main Vac valve closed
10/26/2012	2:55:42 PM	Bypass valve closed
10/26/2012	2:55:42 PM	H2 valve opened
10/26/2012	2:55:42 PM	Bubbler valve opened
10/26/2012	2:55:42 PM	Helium MFC set to  0.000000
10/26/2012	2:55:42 PM	H2 MFC set to  500.000000
10/26/2012	2:55:42 PM	BCl3 MFC set to  0.000000
10/26/2012	2:55:43 PM	PH3 MFC set to  0.000000
10/26/2012	2:55:43 PM	SiCl4 MFC set to  0.000000
10/26/2012	2:55:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	2:55:43 PM	Tube furnace set to 1000
10/26/2012	3:15:43 PM	Helium valve closed
10/26/2012	3:15:43 PM	PH3 valve closed
10/26/2012	3:15:43 PM	Main Vac valve closed
10/26/2012	3:15:43 PM	Bypass valve closed
10/26/2012	3:15:43 PM	H2 valve opened
10/26/2012	3:15:43 PM	BCl3 valve opened
10/26/2012	3:15:43 PM	SiCl4 pre valve opened
10/26/2012	3:15:43 PM	SiCl4 post valve opened
10/26/2012	3:15:43 PM	Bubbler valve opened
10/26/2012	3:15:43 PM	Helium MFC set to  0.000000
10/26/2012	3:15:43 PM	H2 MFC set to  450.000000
10/26/2012	3:15:43 PM	BCl3 MFC set to  1.300000
10/26/2012	3:15:43 PM	PH3 MFC set to  0.000000
10/26/2012	3:15:43 PM	SiCl4 MFC set to  50.000000
10/26/2012	3:15:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:15:43 PM	Tube furnace set to 1000
10/26/2012	3:32:43 PM	Helium valve closed
10/26/2012	3:32:43 PM	BCl3 valve closed
10/26/2012	3:32:43 PM	PH3 valve closed
10/26/2012	3:32:43 PM	SiCl4 pre valve closed
10/26/2012	3:32:43 PM	SiCl4 post valve closed
10/26/2012	3:32:43 PM	Main Vac valve closed
10/26/2012	3:32:43 PM	Bypass valve closed
10/26/2012	3:32:43 PM	H2 valve opened
10/26/2012	3:32:43 PM	Bubbler valve opened
10/26/2012	3:32:43 PM	Helium MFC set to  0.000000
10/26/2012	3:32:43 PM	H2 MFC set to  500.000000
10/26/2012	3:32:43 PM	BCl3 MFC set to  0.000000
10/26/2012	3:32:43 PM	PH3 MFC set to  0.000000
10/26/2012	3:32:43 PM	SiCl4 MFC set to  0.000000
10/26/2012	3:32:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:32:43 PM	Tube furnace set to 750
10/26/2012	3:37:43 PM	H2 valve closed
10/26/2012	3:37:43 PM	BCl3 valve closed
10/26/2012	3:37:43 PM	PH3 valve closed
10/26/2012	3:37:43 PM	SiCl4 pre valve closed
10/26/2012	3:37:43 PM	SiCl4 post valve closed
10/26/2012	3:37:43 PM	Main Vac valve closed
10/26/2012	3:37:43 PM	Bypass valve closed
10/26/2012	3:37:43 PM	Helium valve opened
10/26/2012	3:37:43 PM	Bubbler valve opened
10/26/2012	3:37:43 PM	Helium MFC set to  500.000000
10/26/2012	3:37:43 PM	H2 MFC set to  0.000000
10/26/2012	3:37:43 PM	BCl3 MFC set to  0.000000
10/26/2012	3:37:43 PM	PH3 MFC set to  0.000000
10/26/2012	3:37:43 PM	SiCl4 MFC set to  0.000000
10/26/2012	3:37:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:37:43 PM	Tube furnace set to 0
10/26/2012	3:52:43 PM	Helium valve closed
10/26/2012	3:52:43 PM	H2 valve closed
10/26/2012	3:52:43 PM	BCl3 valve closed
10/26/2012	3:52:43 PM	PH3 valve closed
10/26/2012	3:52:43 PM	SiCl4 pre valve closed
10/26/2012	3:52:43 PM	SiCl4 post valve closed
10/26/2012	3:52:43 PM	Main Vac valve closed
10/26/2012	3:52:43 PM	Bypass valve closed
10/26/2012	3:52:43 PM	Bubbler valve closed
10/26/2012	3:52:43 PM	Helium MFC set to  0.000000
10/26/2012	3:52:43 PM	H2 MFC set to  0.000000
10/26/2012	3:52:43 PM	BCl3 MFC set to  0.000000
10/26/2012	3:52:43 PM	PH3 MFC set to  0.000000
10/26/2012	3:52:43 PM	SiCl4 MFC set to  0.000000
10/26/2012	3:52:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:52:43 PM	Tube furnace set to 0
10/26/2012	3:52:44 PM	Run finished at 3:52 PM
10/26/2012	3:52:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	3:52:49 PM	Recipe started at 3:52 PM
10/26/2012	3:52:49 PM	Helium valve closed
10/26/2012	3:52:49 PM	H2 valve closed
10/26/2012	3:52:49 PM	BCl3 valve closed
10/26/2012	3:52:49 PM	PH3 valve closed
10/26/2012	3:52:49 PM	SiCl4 pre valve closed
10/26/2012	3:52:49 PM	SiCl4 post valve closed
10/26/2012	3:52:49 PM	Main Vac valve closed
10/26/2012	3:52:49 PM	Bypass valve closed
10/26/2012	3:52:49 PM	Bubbler valve closed
10/26/2012	3:52:49 PM	Helium MFC set to  0.000000
10/26/2012	3:52:49 PM	H2 MFC set to  0.000000
10/26/2012	3:52:49 PM	BCl3 MFC set to  0.000000
10/26/2012	3:52:49 PM	PH3 MFC set to  0.000000
10/26/2012	3:52:49 PM	SiCl4 MFC set to  0.000000
10/26/2012	3:52:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:52:49 PM	Tube furnace set to 0
10/26/2012	3:52:52 PM	H2 valve closed
10/26/2012	3:52:52 PM	BCl3 valve closed
10/26/2012	3:52:52 PM	PH3 valve closed
10/26/2012	3:52:52 PM	SiCl4 pre valve closed
10/26/2012	3:52:52 PM	SiCl4 post valve closed
10/26/2012	3:52:52 PM	Main Vac valve closed
10/26/2012	3:52:52 PM	Bypass valve closed
10/26/2012	3:52:52 PM	Bubbler valve closed
10/26/2012	3:52:52 PM	Helium valve opened
10/26/2012	3:52:52 PM	Helium MFC set to  500.000000
10/26/2012	3:52:52 PM	H2 MFC set to  0.000000
10/26/2012	3:52:52 PM	BCl3 MFC set to  0.000000
10/26/2012	3:52:52 PM	PH3 MFC set to  0.000000
10/26/2012	3:52:52 PM	SiCl4 MFC set to  0.000000
10/26/2012	3:52:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:52:52 PM	Tube furnace set to 0
10/26/2012	3:52:52 PM	Helium valve closed
10/26/2012	3:52:52 PM	H2 valve closed
10/26/2012	3:52:52 PM	BCl3 valve closed
10/26/2012	3:52:52 PM	PH3 valve closed
10/26/2012	3:52:52 PM	SiCl4 pre valve closed
10/26/2012	3:52:52 PM	SiCl4 post valve closed
10/26/2012	3:52:52 PM	Main Vac valve closed
10/26/2012	3:52:52 PM	Bypass valve closed
10/26/2012	3:52:52 PM	Bubbler valve closed
10/26/2012	3:52:52 PM	Helium MFC set to  0.000000
10/26/2012	3:52:52 PM	H2 MFC set to  0.000000
10/26/2012	3:52:52 PM	BCl3 MFC set to  0.000000
10/26/2012	3:52:53 PM	PH3 MFC set to  0.000000
10/26/2012	3:52:53 PM	SiCl4 MFC set to  0.000000
10/26/2012	3:52:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	3:52:53 PM	Tube furnace set to 0
10/26/2012	3:52:54 PM	Run finished at 3:52 PM
10/26/2012	3:52:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2012	4:00:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	4:00:01 PM	Recipe started at 4:00 PM
10/26/2012	4:00:01 PM	Helium valve closed
10/26/2012	4:00:01 PM	H2 valve closed
10/26/2012	4:00:01 PM	BCl3 valve closed
10/26/2012	4:00:01 PM	PH3 valve closed
10/26/2012	4:00:01 PM	SiCl4 pre valve closed
10/26/2012	4:00:01 PM	SiCl4 post valve closed
10/26/2012	4:00:01 PM	Main Vac valve closed
10/26/2012	4:00:01 PM	Bubbler valve closed
10/26/2012	4:00:01 PM	Bypass valve opened
10/26/2012	4:00:01 PM	Helium MFC set to  0.000000
10/26/2012	4:00:01 PM	H2 MFC set to  0.000000
10/26/2012	4:00:01 PM	BCl3 MFC set to  0.000000
10/26/2012	4:00:01 PM	PH3 MFC set to  0.000000
10/26/2012	4:00:01 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:00:01 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:00:01 PM	Tube furnace set to 0
10/26/2012	4:01:20 PM	Helium valve closed
10/26/2012	4:01:20 PM	H2 valve closed
10/26/2012	4:01:20 PM	BCl3 valve closed
10/26/2012	4:01:20 PM	PH3 valve closed
10/26/2012	4:01:20 PM	SiCl4 pre valve closed
10/26/2012	4:01:20 PM	SiCl4 post valve closed
10/26/2012	4:01:20 PM	Main Vac valve closed
10/26/2012	4:01:20 PM	Bubbler valve closed
10/26/2012	4:01:20 PM	Bypass valve opened
10/26/2012	4:01:20 PM	Helium MFC set to  0.000000
10/26/2012	4:01:20 PM	H2 MFC set to  0.000000
10/26/2012	4:01:20 PM	BCl3 MFC set to  0.000000
10/26/2012	4:01:20 PM	PH3 MFC set to  0.000000
10/26/2012	4:01:20 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:01:20 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:01:20 PM	Tube furnace set to 0
10/26/2012	4:01:46 PM	Helium valve closed
10/26/2012	4:01:46 PM	H2 valve closed
10/26/2012	4:01:46 PM	BCl3 valve closed
10/26/2012	4:01:46 PM	PH3 valve closed
10/26/2012	4:01:46 PM	SiCl4 pre valve closed
10/26/2012	4:01:46 PM	SiCl4 post valve closed
10/26/2012	4:01:46 PM	Bypass valve closed
10/26/2012	4:01:46 PM	Bubbler valve closed
10/26/2012	4:01:46 PM	Main Vac valve opened
10/26/2012	4:01:46 PM	Helium MFC set to  0.000000
10/26/2012	4:01:46 PM	H2 MFC set to  0.000000
10/26/2012	4:01:46 PM	BCl3 MFC set to  0.000000
10/26/2012	4:01:46 PM	PH3 MFC set to  0.000000
10/26/2012	4:01:46 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:01:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:01:46 PM	Tube furnace set to 0
10/26/2012	4:01:47 PM	Run finished at 4:01 PM
10/26/2012	4:01:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	4:20:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	4:20:37 PM	Recipe started at 4:20 PM
10/26/2012	4:20:37 PM	Helium valve closed
10/26/2012	4:20:37 PM	H2 valve closed
10/26/2012	4:20:37 PM	BCl3 valve closed
10/26/2012	4:20:37 PM	PH3 valve closed
10/26/2012	4:20:37 PM	SiCl4 pre valve closed
10/26/2012	4:20:37 PM	SiCl4 post valve closed
10/26/2012	4:20:37 PM	Main Vac valve closed
10/26/2012	4:20:37 PM	Bubbler valve closed
10/26/2012	4:20:37 PM	Bypass valve opened
10/26/2012	4:20:37 PM	Helium MFC set to  0.000000
10/26/2012	4:20:37 PM	H2 MFC set to  0.000000
10/26/2012	4:20:37 PM	BCl3 MFC set to  0.000000
10/26/2012	4:20:37 PM	PH3 MFC set to  0.000000
10/26/2012	4:20:37 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:20:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:20:37 PM	Tube furnace set to 0
10/26/2012	4:20:37 PM	Helium valve closed
10/26/2012	4:20:37 PM	H2 valve closed
10/26/2012	4:20:37 PM	BCl3 valve closed
10/26/2012	4:20:37 PM	PH3 valve closed
10/26/2012	4:20:37 PM	SiCl4 pre valve closed
10/26/2012	4:20:37 PM	SiCl4 post valve closed
10/26/2012	4:20:37 PM	Main Vac valve closed
10/26/2012	4:20:37 PM	Bubbler valve closed
10/26/2012	4:20:37 PM	Bypass valve opened
10/26/2012	4:20:37 PM	Helium MFC set to  0.000000
10/26/2012	4:20:37 PM	H2 MFC set to  0.000000
10/26/2012	4:20:37 PM	BCl3 MFC set to  0.000000
10/26/2012	4:20:37 PM	PH3 MFC set to  0.000000
10/26/2012	4:20:37 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:20:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:20:38 PM	Tube furnace set to 0
10/26/2012	4:20:38 PM	Helium valve closed
10/26/2012	4:20:38 PM	H2 valve closed
10/26/2012	4:20:38 PM	BCl3 valve closed
10/26/2012	4:20:38 PM	PH3 valve closed
10/26/2012	4:20:38 PM	SiCl4 pre valve closed
10/26/2012	4:20:38 PM	SiCl4 post valve closed
10/26/2012	4:20:38 PM	Bypass valve closed
10/26/2012	4:20:38 PM	Bubbler valve closed
10/26/2012	4:20:38 PM	Main Vac valve opened
10/26/2012	4:20:38 PM	Helium MFC set to  0.000000
10/26/2012	4:20:38 PM	H2 MFC set to  0.000000
10/26/2012	4:20:38 PM	BCl3 MFC set to  0.000000
10/26/2012	4:20:38 PM	PH3 MFC set to  0.000000
10/26/2012	4:20:38 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:20:38 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:20:39 PM	Tube furnace set to 0
10/26/2012	4:20:40 PM	H2 valve closed
10/26/2012	4:20:40 PM	BCl3 valve closed
10/26/2012	4:20:40 PM	PH3 valve closed
10/26/2012	4:20:40 PM	SiCl4 pre valve closed
10/26/2012	4:20:40 PM	SiCl4 post valve closed
10/26/2012	4:20:40 PM	Bypass valve closed
10/26/2012	4:20:40 PM	Bubbler valve closed
10/26/2012	4:20:40 PM	Helium valve opened
10/26/2012	4:20:40 PM	Main Vac valve opened
10/26/2012	4:20:40 PM	Helium MFC set to  20.000000
10/26/2012	4:20:40 PM	H2 MFC set to  0.000000
10/26/2012	4:20:40 PM	BCl3 MFC set to  0.000000
10/26/2012	4:20:40 PM	PH3 MFC set to  0.000000
10/26/2012	4:20:40 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:20:40 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:20:40 PM	Tube furnace set to 0
10/26/2012	4:21:10 PM	Helium valve closed
10/26/2012	4:21:10 PM	H2 valve closed
10/26/2012	4:21:10 PM	BCl3 valve closed
10/26/2012	4:21:10 PM	PH3 valve closed
10/26/2012	4:21:10 PM	SiCl4 pre valve closed
10/26/2012	4:21:10 PM	SiCl4 post valve closed
10/26/2012	4:21:10 PM	Bypass valve closed
10/26/2012	4:21:10 PM	Bubbler valve closed
10/26/2012	4:21:10 PM	Main Vac valve opened
10/26/2012	4:21:10 PM	Helium MFC set to  0.000000
10/26/2012	4:21:10 PM	H2 MFC set to  0.000000
10/26/2012	4:21:10 PM	BCl3 MFC set to  0.000000
10/26/2012	4:21:10 PM	PH3 MFC set to  0.000000
10/26/2012	4:21:10 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:21:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:21:11 PM	Tube furnace set to 0
10/26/2012	4:21:41 PM	H2 valve closed
10/26/2012	4:21:41 PM	BCl3 valve closed
10/26/2012	4:21:41 PM	PH3 valve closed
10/26/2012	4:21:41 PM	SiCl4 pre valve closed
10/26/2012	4:21:41 PM	SiCl4 post valve closed
10/26/2012	4:21:41 PM	Bypass valve closed
10/26/2012	4:21:41 PM	Bubbler valve closed
10/26/2012	4:21:41 PM	Helium valve opened
10/26/2012	4:21:41 PM	Main Vac valve opened
10/26/2012	4:21:41 PM	Helium MFC set to  20.000000
10/26/2012	4:21:41 PM	H2 MFC set to  0.000000
10/26/2012	4:21:41 PM	BCl3 MFC set to  0.000000
10/26/2012	4:21:41 PM	PH3 MFC set to  0.000000
10/26/2012	4:21:41 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:21:41 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:21:41 PM	Tube furnace set to 0
10/26/2012	4:22:11 PM	Helium valve closed
10/26/2012	4:22:11 PM	H2 valve closed
10/26/2012	4:22:11 PM	BCl3 valve closed
10/26/2012	4:22:11 PM	PH3 valve closed
10/26/2012	4:22:11 PM	SiCl4 pre valve closed
10/26/2012	4:22:11 PM	SiCl4 post valve closed
10/26/2012	4:22:11 PM	Bypass valve closed
10/26/2012	4:22:11 PM	Bubbler valve closed
10/26/2012	4:22:11 PM	Main Vac valve opened
10/26/2012	4:22:11 PM	Helium MFC set to  0.000000
10/26/2012	4:22:11 PM	H2 MFC set to  0.000000
10/26/2012	4:22:11 PM	BCl3 MFC set to  0.000000
10/26/2012	4:22:11 PM	PH3 MFC set to  0.000000
10/26/2012	4:22:11 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:22:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:22:11 PM	Tube furnace set to 0
10/26/2012	4:22:41 PM	H2 valve closed
10/26/2012	4:22:41 PM	BCl3 valve closed
10/26/2012	4:22:41 PM	PH3 valve closed
10/26/2012	4:22:41 PM	SiCl4 pre valve closed
10/26/2012	4:22:41 PM	SiCl4 post valve closed
10/26/2012	4:22:41 PM	Bypass valve closed
10/26/2012	4:22:41 PM	Bubbler valve closed
10/26/2012	4:22:41 PM	Helium valve opened
10/26/2012	4:22:41 PM	Main Vac valve opened
10/26/2012	4:22:41 PM	Helium MFC set to  20.000000
10/26/2012	4:22:41 PM	H2 MFC set to  0.000000
10/26/2012	4:22:41 PM	BCl3 MFC set to  0.000000
10/26/2012	4:22:41 PM	PH3 MFC set to  0.000000
10/26/2012	4:22:41 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:22:41 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:22:41 PM	Tube furnace set to 0
10/26/2012	4:23:11 PM	Helium valve closed
10/26/2012	4:23:11 PM	H2 valve closed
10/26/2012	4:23:11 PM	BCl3 valve closed
10/26/2012	4:23:11 PM	PH3 valve closed
10/26/2012	4:23:11 PM	SiCl4 pre valve closed
10/26/2012	4:23:11 PM	SiCl4 post valve closed
10/26/2012	4:23:11 PM	Bypass valve closed
10/26/2012	4:23:11 PM	Bubbler valve closed
10/26/2012	4:23:11 PM	Main Vac valve opened
10/26/2012	4:23:11 PM	Helium MFC set to  0.000000
10/26/2012	4:23:11 PM	H2 MFC set to  0.000000
10/26/2012	4:23:11 PM	BCl3 MFC set to  0.000000
10/26/2012	4:23:11 PM	PH3 MFC set to  0.000000
10/26/2012	4:23:11 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:23:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:23:12 PM	Tube furnace set to 0
10/26/2012	4:23:42 PM	H2 valve closed
10/26/2012	4:23:42 PM	BCl3 valve closed
10/26/2012	4:23:42 PM	PH3 valve closed
10/26/2012	4:23:42 PM	SiCl4 pre valve closed
10/26/2012	4:23:42 PM	SiCl4 post valve closed
10/26/2012	4:23:42 PM	Bypass valve closed
10/26/2012	4:23:42 PM	Bubbler valve closed
10/26/2012	4:23:42 PM	Helium valve opened
10/26/2012	4:23:42 PM	Main Vac valve opened
10/26/2012	4:23:42 PM	Helium MFC set to  20.000000
10/26/2012	4:23:42 PM	H2 MFC set to  0.000000
10/26/2012	4:23:42 PM	BCl3 MFC set to  0.000000
10/26/2012	4:23:42 PM	PH3 MFC set to  0.000000
10/26/2012	4:23:42 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:23:42 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:23:42 PM	Tube furnace set to 0
10/26/2012	4:24:12 PM	Helium valve closed
10/26/2012	4:24:12 PM	H2 valve closed
10/26/2012	4:24:12 PM	BCl3 valve closed
10/26/2012	4:24:12 PM	PH3 valve closed
10/26/2012	4:24:12 PM	SiCl4 pre valve closed
10/26/2012	4:24:12 PM	SiCl4 post valve closed
10/26/2012	4:24:12 PM	Bypass valve closed
10/26/2012	4:24:12 PM	Bubbler valve closed
10/26/2012	4:24:12 PM	Main Vac valve opened
10/26/2012	4:24:12 PM	Helium MFC set to  0.000000
10/26/2012	4:24:12 PM	H2 MFC set to  0.000000
10/26/2012	4:24:12 PM	BCl3 MFC set to  0.000000
10/26/2012	4:24:12 PM	PH3 MFC set to  0.000000
10/26/2012	4:24:12 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:24:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:24:12 PM	Tube furnace set to 0
10/26/2012	4:24:42 PM	H2 valve closed
10/26/2012	4:24:42 PM	BCl3 valve closed
10/26/2012	4:24:42 PM	PH3 valve closed
10/26/2012	4:24:42 PM	SiCl4 pre valve closed
10/26/2012	4:24:42 PM	SiCl4 post valve closed
10/26/2012	4:24:42 PM	Bypass valve closed
10/26/2012	4:24:42 PM	Bubbler valve closed
10/26/2012	4:24:42 PM	Helium valve opened
10/26/2012	4:24:42 PM	Main Vac valve opened
10/26/2012	4:24:42 PM	Helium MFC set to  20.000000
10/26/2012	4:24:42 PM	H2 MFC set to  0.000000
10/26/2012	4:24:42 PM	BCl3 MFC set to  0.000000
10/26/2012	4:24:42 PM	PH3 MFC set to  0.000000
10/26/2012	4:24:42 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:24:42 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:24:42 PM	Tube furnace set to 0
10/26/2012	4:25:12 PM	Helium valve closed
10/26/2012	4:25:12 PM	H2 valve closed
10/26/2012	4:25:12 PM	BCl3 valve closed
10/26/2012	4:25:12 PM	PH3 valve closed
10/26/2012	4:25:12 PM	SiCl4 pre valve closed
10/26/2012	4:25:12 PM	SiCl4 post valve closed
10/26/2012	4:25:12 PM	Bypass valve closed
10/26/2012	4:25:12 PM	Bubbler valve closed
10/26/2012	4:25:12 PM	Main Vac valve opened
10/26/2012	4:25:12 PM	Helium MFC set to  0.000000
10/26/2012	4:25:12 PM	H2 MFC set to  0.000000
10/26/2012	4:25:12 PM	BCl3 MFC set to  0.000000
10/26/2012	4:25:12 PM	PH3 MFC set to  0.000000
10/26/2012	4:25:12 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:25:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:25:13 PM	Tube furnace set to 0
10/26/2012	4:25:43 PM	H2 valve closed
10/26/2012	4:25:43 PM	BCl3 valve closed
10/26/2012	4:25:43 PM	PH3 valve closed
10/26/2012	4:25:43 PM	SiCl4 pre valve closed
10/26/2012	4:25:43 PM	SiCl4 post valve closed
10/26/2012	4:25:43 PM	Bypass valve closed
10/26/2012	4:25:43 PM	Bubbler valve closed
10/26/2012	4:25:43 PM	Helium valve opened
10/26/2012	4:25:43 PM	Main Vac valve opened
10/26/2012	4:25:43 PM	Helium MFC set to  20.000000
10/26/2012	4:25:43 PM	H2 MFC set to  0.000000
10/26/2012	4:25:43 PM	BCl3 MFC set to  0.000000
10/26/2012	4:25:43 PM	PH3 MFC set to  0.000000
10/26/2012	4:25:43 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:25:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:25:43 PM	Tube furnace set to 0
10/26/2012	4:26:13 PM	Helium valve closed
10/26/2012	4:26:13 PM	H2 valve closed
10/26/2012	4:26:13 PM	BCl3 valve closed
10/26/2012	4:26:13 PM	PH3 valve closed
10/26/2012	4:26:13 PM	SiCl4 pre valve closed
10/26/2012	4:26:13 PM	SiCl4 post valve closed
10/26/2012	4:26:13 PM	Bypass valve closed
10/26/2012	4:26:13 PM	Bubbler valve closed
10/26/2012	4:26:13 PM	Main Vac valve opened
10/26/2012	4:26:13 PM	Helium MFC set to  0.000000
10/26/2012	4:26:13 PM	H2 MFC set to  0.000000
10/26/2012	4:26:13 PM	BCl3 MFC set to  0.000000
10/26/2012	4:26:13 PM	PH3 MFC set to  0.000000
10/26/2012	4:26:13 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:26:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:26:13 PM	Tube furnace set to 0
10/26/2012	4:26:43 PM	H2 valve closed
10/26/2012	4:26:43 PM	BCl3 valve closed
10/26/2012	4:26:43 PM	PH3 valve closed
10/26/2012	4:26:43 PM	SiCl4 pre valve closed
10/26/2012	4:26:43 PM	SiCl4 post valve closed
10/26/2012	4:26:43 PM	Bypass valve closed
10/26/2012	4:26:43 PM	Bubbler valve closed
10/26/2012	4:26:43 PM	Helium valve opened
10/26/2012	4:26:43 PM	Main Vac valve opened
10/26/2012	4:26:43 PM	Helium MFC set to  20.000000
10/26/2012	4:26:43 PM	H2 MFC set to  0.000000
10/26/2012	4:26:43 PM	BCl3 MFC set to  0.000000
10/26/2012	4:26:43 PM	PH3 MFC set to  0.000000
10/26/2012	4:26:43 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:26:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:26:43 PM	Tube furnace set to 0
10/26/2012	4:27:13 PM	Helium valve closed
10/26/2012	4:27:13 PM	H2 valve closed
10/26/2012	4:27:13 PM	BCl3 valve closed
10/26/2012	4:27:13 PM	PH3 valve closed
10/26/2012	4:27:13 PM	SiCl4 pre valve closed
10/26/2012	4:27:13 PM	SiCl4 post valve closed
10/26/2012	4:27:13 PM	Bypass valve closed
10/26/2012	4:27:13 PM	Bubbler valve closed
10/26/2012	4:27:13 PM	Main Vac valve opened
10/26/2012	4:27:13 PM	Helium MFC set to  0.000000
10/26/2012	4:27:13 PM	H2 MFC set to  0.000000
10/26/2012	4:27:13 PM	BCl3 MFC set to  0.000000
10/26/2012	4:27:13 PM	PH3 MFC set to  0.000000
10/26/2012	4:27:13 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:27:13 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:27:14 PM	Tube furnace set to 0
10/26/2012	4:27:44 PM	H2 valve closed
10/26/2012	4:27:44 PM	BCl3 valve closed
10/26/2012	4:27:44 PM	PH3 valve closed
10/26/2012	4:27:44 PM	SiCl4 pre valve closed
10/26/2012	4:27:44 PM	SiCl4 post valve closed
10/26/2012	4:27:44 PM	Bypass valve closed
10/26/2012	4:27:44 PM	Bubbler valve closed
10/26/2012	4:27:44 PM	Helium valve opened
10/26/2012	4:27:44 PM	Main Vac valve opened
10/26/2012	4:27:44 PM	Helium MFC set to  20.000000
10/26/2012	4:27:44 PM	H2 MFC set to  0.000000
10/26/2012	4:27:44 PM	BCl3 MFC set to  0.000000
10/26/2012	4:27:44 PM	PH3 MFC set to  0.000000
10/26/2012	4:27:44 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:27:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:27:44 PM	Tube furnace set to 0
10/26/2012	4:28:14 PM	Helium valve closed
10/26/2012	4:28:14 PM	H2 valve closed
10/26/2012	4:28:14 PM	BCl3 valve closed
10/26/2012	4:28:14 PM	PH3 valve closed
10/26/2012	4:28:14 PM	SiCl4 pre valve closed
10/26/2012	4:28:14 PM	SiCl4 post valve closed
10/26/2012	4:28:14 PM	Bypass valve closed
10/26/2012	4:28:14 PM	Bubbler valve closed
10/26/2012	4:28:14 PM	Main Vac valve opened
10/26/2012	4:28:14 PM	Helium MFC set to  0.000000
10/26/2012	4:28:14 PM	H2 MFC set to  0.000000
10/26/2012	4:28:14 PM	BCl3 MFC set to  0.000000
10/26/2012	4:28:14 PM	PH3 MFC set to  0.000000
10/26/2012	4:28:14 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:28:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:28:14 PM	Tube furnace set to 0
10/26/2012	4:28:44 PM	H2 valve closed
10/26/2012	4:28:44 PM	BCl3 valve closed
10/26/2012	4:28:44 PM	PH3 valve closed
10/26/2012	4:28:44 PM	SiCl4 pre valve closed
10/26/2012	4:28:44 PM	SiCl4 post valve closed
10/26/2012	4:28:44 PM	Bypass valve closed
10/26/2012	4:28:44 PM	Bubbler valve closed
10/26/2012	4:28:44 PM	Helium valve opened
10/26/2012	4:28:44 PM	Main Vac valve opened
10/26/2012	4:28:44 PM	Helium MFC set to  20.000000
10/26/2012	4:28:44 PM	H2 MFC set to  0.000000
10/26/2012	4:28:44 PM	BCl3 MFC set to  0.000000
10/26/2012	4:28:44 PM	PH3 MFC set to  0.000000
10/26/2012	4:28:44 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:28:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:28:44 PM	Tube furnace set to 0
10/26/2012	4:29:14 PM	Helium valve closed
10/26/2012	4:29:14 PM	H2 valve closed
10/26/2012	4:29:14 PM	BCl3 valve closed
10/26/2012	4:29:14 PM	PH3 valve closed
10/26/2012	4:29:14 PM	SiCl4 pre valve closed
10/26/2012	4:29:14 PM	SiCl4 post valve closed
10/26/2012	4:29:14 PM	Bypass valve closed
10/26/2012	4:29:14 PM	Bubbler valve closed
10/26/2012	4:29:14 PM	Main Vac valve opened
10/26/2012	4:29:14 PM	Helium MFC set to  0.000000
10/26/2012	4:29:14 PM	H2 MFC set to  0.000000
10/26/2012	4:29:14 PM	BCl3 MFC set to  0.000000
10/26/2012	4:29:14 PM	PH3 MFC set to  0.000000
10/26/2012	4:29:14 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:29:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:29:15 PM	Tube furnace set to 0
10/26/2012	4:29:45 PM	H2 valve closed
10/26/2012	4:29:45 PM	BCl3 valve closed
10/26/2012	4:29:45 PM	PH3 valve closed
10/26/2012	4:29:45 PM	SiCl4 pre valve closed
10/26/2012	4:29:45 PM	SiCl4 post valve closed
10/26/2012	4:29:45 PM	Bypass valve closed
10/26/2012	4:29:45 PM	Bubbler valve closed
10/26/2012	4:29:45 PM	Helium valve opened
10/26/2012	4:29:45 PM	Main Vac valve opened
10/26/2012	4:29:45 PM	Helium MFC set to  20.000000
10/26/2012	4:29:45 PM	H2 MFC set to  0.000000
10/26/2012	4:29:45 PM	BCl3 MFC set to  0.000000
10/26/2012	4:29:45 PM	PH3 MFC set to  0.000000
10/26/2012	4:29:45 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:29:45 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:29:45 PM	Tube furnace set to 0
10/26/2012	4:30:15 PM	Helium valve closed
10/26/2012	4:30:15 PM	H2 valve closed
10/26/2012	4:30:15 PM	BCl3 valve closed
10/26/2012	4:30:15 PM	PH3 valve closed
10/26/2012	4:30:15 PM	SiCl4 pre valve closed
10/26/2012	4:30:15 PM	SiCl4 post valve closed
10/26/2012	4:30:15 PM	Bypass valve closed
10/26/2012	4:30:15 PM	Bubbler valve closed
10/26/2012	4:30:15 PM	Main Vac valve opened
10/26/2012	4:30:15 PM	Helium MFC set to  0.000000
10/26/2012	4:30:15 PM	H2 MFC set to  0.000000
10/26/2012	4:30:15 PM	BCl3 MFC set to  0.000000
10/26/2012	4:30:15 PM	PH3 MFC set to  0.000000
10/26/2012	4:30:15 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:30:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:30:15 PM	Tube furnace set to 0
10/26/2012	4:30:16 PM	Run finished at 4:30 PM
10/26/2012	4:30:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/26/2012	4:30:56 PM	Main Vac valve closed
10/26/2012	4:31:10 PM	Main Vac valve opened
10/26/2012	4:31:32 PM	Recipe started at 4:31 PM
10/26/2012	4:31:32 PM	Helium valve closed
10/26/2012	4:31:32 PM	H2 valve closed
10/26/2012	4:31:32 PM	BCl3 valve closed
10/26/2012	4:31:32 PM	PH3 valve closed
10/26/2012	4:31:32 PM	SiCl4 pre valve closed
10/26/2012	4:31:32 PM	SiCl4 post valve closed
10/26/2012	4:31:32 PM	Main Vac valve closed
10/26/2012	4:31:32 PM	Bypass valve closed
10/26/2012	4:31:32 PM	Bubbler valve closed
10/26/2012	4:31:32 PM	Helium MFC set to  0.000000
10/26/2012	4:31:32 PM	H2 MFC set to  0.000000
10/26/2012	4:31:32 PM	BCl3 MFC set to  0.000000
10/26/2012	4:31:32 PM	PH3 MFC set to  0.000000
10/26/2012	4:31:32 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:31:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:31:33 PM	Tube furnace set to 0
10/26/2012	4:31:36 PM	Helium valve closed
10/26/2012	4:31:36 PM	BCl3 valve closed
10/26/2012	4:31:36 PM	PH3 valve closed
10/26/2012	4:31:36 PM	SiCl4 pre valve closed
10/26/2012	4:31:36 PM	SiCl4 post valve closed
10/26/2012	4:31:36 PM	Main Vac valve closed
10/26/2012	4:31:36 PM	Bypass valve closed
10/26/2012	4:31:36 PM	Bubbler valve closed
10/26/2012	4:31:36 PM	H2 valve opened
10/26/2012	4:31:36 PM	Helium MFC set to  0.000000
10/26/2012	4:31:36 PM	H2 MFC set to  500.000000
10/26/2012	4:31:36 PM	BCl3 MFC set to  0.000000
10/26/2012	4:31:36 PM	PH3 MFC set to  0.000000
10/26/2012	4:31:36 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:31:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:31:36 PM	Tube furnace set to 0
10/26/2012	4:32:52 PM	Helium valve closed
10/26/2012	4:32:52 PM	BCl3 valve closed
10/26/2012	4:32:52 PM	PH3 valve closed
10/26/2012	4:32:52 PM	SiCl4 pre valve closed
10/26/2012	4:32:52 PM	SiCl4 post valve closed
10/26/2012	4:32:52 PM	Main Vac valve closed
10/26/2012	4:32:52 PM	Bypass valve closed
10/26/2012	4:32:52 PM	H2 valve opened
10/26/2012	4:32:52 PM	Bubbler valve opened
10/26/2012	4:32:52 PM	Helium MFC set to  0.000000
10/26/2012	4:32:52 PM	H2 MFC set to  500.000000
10/26/2012	4:32:52 PM	BCl3 MFC set to  0.000000
10/26/2012	4:32:52 PM	PH3 MFC set to  0.000000
10/26/2012	4:32:52 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:32:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:32:52 PM	Tube furnace set to 0
10/26/2012	4:32:53 PM	Helium valve closed
10/26/2012	4:32:53 PM	BCl3 valve closed
10/26/2012	4:32:53 PM	PH3 valve closed
10/26/2012	4:32:53 PM	SiCl4 pre valve closed
10/26/2012	4:32:53 PM	SiCl4 post valve closed
10/26/2012	4:32:53 PM	Main Vac valve closed
10/26/2012	4:32:53 PM	Bypass valve closed
10/26/2012	4:32:53 PM	H2 valve opened
10/26/2012	4:32:53 PM	Bubbler valve opened
10/26/2012	4:32:53 PM	Helium MFC set to  0.000000
10/26/2012	4:32:53 PM	H2 MFC set to  500.000000
10/26/2012	4:32:53 PM	BCl3 MFC set to  0.000000
10/26/2012	4:32:53 PM	PH3 MFC set to  0.000000
10/26/2012	4:32:53 PM	SiCl4 MFC set to  0.000000
10/26/2012	4:32:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:32:53 PM	Tube furnace set to 1000
10/26/2012	4:52:53 PM	Helium valve closed
10/26/2012	4:52:53 PM	PH3 valve closed
10/26/2012	4:52:53 PM	Main Vac valve closed
10/26/2012	4:52:53 PM	Bypass valve closed
10/26/2012	4:52:53 PM	H2 valve opened
10/26/2012	4:52:53 PM	BCl3 valve opened
10/26/2012	4:52:53 PM	SiCl4 pre valve opened
10/26/2012	4:52:53 PM	SiCl4 post valve opened
10/26/2012	4:52:53 PM	Bubbler valve opened
10/26/2012	4:52:53 PM	Helium MFC set to  0.000000
10/26/2012	4:52:53 PM	H2 MFC set to  450.000000
10/26/2012	4:52:53 PM	BCl3 MFC set to  1.300000
10/26/2012	4:52:53 PM	PH3 MFC set to  0.000000
10/26/2012	4:52:53 PM	SiCl4 MFC set to  50.000000
10/26/2012	4:52:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	4:52:53 PM	Tube furnace set to 1000
10/26/2012	5:09:53 PM	Helium valve closed
10/26/2012	5:09:53 PM	BCl3 valve closed
10/26/2012	5:09:54 PM	PH3 valve closed
10/26/2012	5:09:54 PM	SiCl4 pre valve closed
10/26/2012	5:09:54 PM	SiCl4 post valve closed
10/26/2012	5:09:54 PM	Main Vac valve closed
10/26/2012	5:09:54 PM	Bypass valve closed
10/26/2012	5:09:54 PM	H2 valve opened
10/26/2012	5:09:54 PM	Bubbler valve opened
10/26/2012	5:09:54 PM	Helium MFC set to  0.000000
10/26/2012	5:09:54 PM	H2 MFC set to  500.000000
10/26/2012	5:09:54 PM	BCl3 MFC set to  0.000000
10/26/2012	5:09:54 PM	PH3 MFC set to  0.000000
10/26/2012	5:09:54 PM	SiCl4 MFC set to  0.000000
10/26/2012	5:09:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	5:09:54 PM	Tube furnace set to 750
10/26/2012	5:14:54 PM	H2 valve closed
10/26/2012	5:14:54 PM	BCl3 valve closed
10/26/2012	5:14:54 PM	PH3 valve closed
10/26/2012	5:14:54 PM	SiCl4 pre valve closed
10/26/2012	5:14:54 PM	SiCl4 post valve closed
10/26/2012	5:14:54 PM	Main Vac valve closed
10/26/2012	5:14:54 PM	Bypass valve closed
10/26/2012	5:14:54 PM	Helium valve opened
10/26/2012	5:14:54 PM	Bubbler valve opened
10/26/2012	5:14:54 PM	Helium MFC set to  500.000000
10/26/2012	5:14:54 PM	H2 MFC set to  0.000000
10/26/2012	5:14:54 PM	BCl3 MFC set to  0.000000
10/26/2012	5:14:54 PM	PH3 MFC set to  0.000000
10/26/2012	5:14:54 PM	SiCl4 MFC set to  0.000000
10/26/2012	5:14:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	5:14:54 PM	Tube furnace set to 0
10/26/2012	5:28:29 PM	Helium valve closed
10/26/2012	5:28:29 PM	H2 valve closed
10/26/2012	5:28:29 PM	BCl3 valve closed
10/26/2012	5:28:29 PM	PH3 valve closed
10/26/2012	5:28:29 PM	SiCl4 pre valve closed
10/26/2012	5:28:29 PM	SiCl4 post valve closed
10/26/2012	5:28:29 PM	Main Vac valve closed
10/26/2012	5:28:29 PM	Bypass valve closed
10/26/2012	5:28:29 PM	Bubbler valve closed
10/26/2012	5:28:29 PM	Helium MFC set to  0.000000
10/26/2012	5:28:29 PM	H2 MFC set to  0.000000
10/26/2012	5:28:29 PM	BCl3 MFC set to  0.000000
10/26/2012	5:28:29 PM	PH3 MFC set to  0.000000
10/26/2012	5:28:29 PM	SiCl4 MFC set to  0.000000
10/26/2012	5:28:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	5:28:29 PM	Tube furnace set to 0
10/26/2012	5:28:30 PM	Run finished at 5:28 PM
10/26/2012	5:34:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2012	5:35:00 PM	Recipe started at 5:35 PM
10/26/2012	5:35:00 PM	Helium valve closed
10/26/2012	5:35:00 PM	H2 valve closed
10/26/2012	5:35:00 PM	BCl3 valve closed
10/26/2012	5:35:00 PM	PH3 valve closed
10/26/2012	5:35:00 PM	SiCl4 pre valve closed
10/26/2012	5:35:00 PM	SiCl4 post valve closed
10/26/2012	5:35:00 PM	Main Vac valve closed
10/26/2012	5:35:00 PM	Bubbler valve closed
10/26/2012	5:35:00 PM	Bypass valve opened
10/26/2012	5:35:00 PM	Helium MFC set to  0.000000
10/26/2012	5:35:00 PM	H2 MFC set to  0.000000
10/26/2012	5:35:00 PM	BCl3 MFC set to  0.000000
10/26/2012	5:35:00 PM	PH3 MFC set to  0.000000
10/26/2012	5:35:00 PM	SiCl4 MFC set to  0.000000
10/26/2012	5:35:00 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	5:35:00 PM	Tube furnace set to 0
10/26/2012	5:36:27 PM	Helium valve closed
10/26/2012	5:36:27 PM	H2 valve closed
10/26/2012	5:36:27 PM	BCl3 valve closed
10/26/2012	5:36:27 PM	PH3 valve closed
10/26/2012	5:36:27 PM	SiCl4 pre valve closed
10/26/2012	5:36:27 PM	SiCl4 post valve closed
10/26/2012	5:36:27 PM	Main Vac valve closed
10/26/2012	5:36:27 PM	Bubbler valve closed
10/26/2012	5:36:27 PM	Bypass valve opened
10/26/2012	5:36:27 PM	Helium MFC set to  0.000000
10/26/2012	5:36:27 PM	H2 MFC set to  0.000000
10/26/2012	5:36:27 PM	BCl3 MFC set to  0.000000
10/26/2012	5:36:27 PM	PH3 MFC set to  0.000000
10/26/2012	5:36:27 PM	SiCl4 MFC set to  0.000000
10/26/2012	5:36:27 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	5:36:28 PM	Tube furnace set to 0
10/26/2012	5:37:28 PM	Helium valve closed
10/26/2012	5:37:28 PM	H2 valve closed
10/26/2012	5:37:28 PM	BCl3 valve closed
10/26/2012	5:37:28 PM	PH3 valve closed
10/26/2012	5:37:28 PM	SiCl4 pre valve closed
10/26/2012	5:37:28 PM	SiCl4 post valve closed
10/26/2012	5:37:28 PM	Bypass valve closed
10/26/2012	5:37:28 PM	Bubbler valve closed
10/26/2012	5:37:28 PM	Main Vac valve opened
10/26/2012	5:37:28 PM	Helium MFC set to  0.000000
10/26/2012	5:37:28 PM	H2 MFC set to  0.000000
10/26/2012	5:37:28 PM	BCl3 MFC set to  0.000000
10/26/2012	5:37:28 PM	PH3 MFC set to  0.000000
10/26/2012	5:37:28 PM	SiCl4 MFC set to  0.000000
10/26/2012	5:37:28 PM	Bypass solenoid MFC set to  0.000000
10/26/2012	5:37:28 PM	Tube furnace set to 0
10/26/2012	5:37:29 PM	Run finished at 5:37 PM
10/26/2012	5:37:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
